Machine automatic management system and method thereof

Abstract

Provided are a machine automatic management system and a method thereof. According to an embodiment, the machine automatic management system can include: a plurality of machines, a plurality of remotecontrol devices, a manufacturing execution system, and a monitoring device. The plurality of remote control devices are respectively coupled to the respective machines. The manufacturing execution system is used to provide a plurality of process instructions for operating the plurality of machines. The monitoring device is coupled to the plurality of remote control devices and the manufacturing execution system, and the monitoring device receives at least one of the plurality of process instructions from the manufacturing execution system, and executes one of the plurality of sets of standardoperating program source codes according to the received process instructions, to control each remote control device to perform automatic operation of each machine.

Description

technical field [0001] The present invention relates to a management system and a management method, and in particular to a machine automation management system and a method thereof. Background technique [0002] With the development of science and technology, the development of various electronic products is becoming more and more diversified, and the semiconductor process technology is also developing towards miniaturization and high density. In the current semiconductor manufacturing technology, such as wafer (Wafer) manufacturing technology, the process equipment may need to be operated and monitored around the clock. In the general machine production line management system, it may be necessary to rely on operators to manually input on the machine parameters or execute a series of fixed operation instructions, and the number of machines that an operator can control is usually a single digit. Although, some production lines currently use remote control management machines...

AI Technical Summary

Problems solved by technology

In the current semiconductor manufacturing technology, such as wafer (Wafer) manufacturing technology, the process equipment may need to be operated and monitored around the clock. In the general machine production line management system, it may be necessary to rely on operators to manually input on the machine parameters or execute a series of fixed operation instructions, and the number of machines that an operator can control is usually a single digit. Although, some production lines currently use remote control management machines to remotely manage machines, which can improve the management machine. However, the operator is still required to be on duty in front of the remote control and management machine. It is very labor-intensive to rely on the operator to manage the progress of the process production line or troubleshoot. In addition, due to the relationship between manual operation, there is a possibility of human error. , in addition, if the machines operated by different operators need to interact with each other online, the interaction efficiency will also be reduced due to the need for coordination between personnel. So far, how to propose a production line management system that can be fully automated has become the current important subject

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