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A multi-axis adjustable suspension support device

A technology of support device and support rod, applied in the direction of climate sustainability, sustainable manufacturing/processing, electrical components, etc., can solve the problems of not being able to achieve sealing, support and elastic adjustment at the same time, and cumbersome adjustment mechanism, so as to achieve convenient adjustment , The effect of the overall structure is simple

Active Publication Date: 2019-01-08
LAPLACE RENEWABLE ENERGY TECH CO LTD
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  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

At present, the common adjustment mechanisms are relatively heavy and cannot realize the functions of sealing, support and elastic adjustment at the same time.

Method used

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  • A multi-axis adjustable suspension support device
  • A multi-axis adjustable suspension support device
  • A multi-axis adjustable suspension support device

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Experimental program
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Embodiment Construction

[0052] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0053] refer to Figures 1 to 8As shown, the present invention provides a multi-axis adjustable suspension support device, including a Z-axis adjustment mechanism 2, an RZ-axis adjustment mechanism 3, a Y-axis adjustment mechanism 4, an RY-axis adjustment mechanism 5, a support rod mechanism 6, and a furnace door seal Mechanism 7; the RZ-axis adjustment mechanism 2 is rotationally connected to one side of the Z-axis adjustment mechanism 1, and the Z-axis adjustment mechanism 1 is used to drive the RZ-axis adjustment mechanism 2 to move along the Z-axis direction; the Y-axis adjustment mechanism 3 is connected to the RZ The axis adjustment mechanism 2 is fixedly connected, and the RZ axis adjustment mechanism 2 is used to drive the Y axis adjustment mechanism 3 to rotate on the first plane, and the first plane is parallel to the direction of t...

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Abstract

The invention discloses a multi-axis adjustable suspension support device. The Z-axis adjusting mechanism is used for driving the RZ-axis adjusting mechanism to move along the Z-axis direction. The RZ-axis adjusting mechanism is used for driving the Y-axis adjusting mechanism to make rotational movement in the first plane, the first plane is parallel to the Z-axis direction; The Y-axis adjusting mechanism is used for driving the RY-axis adjusting mechanism to move along the Y-axis direction; One end of the support rod mechanism is connected with the RY axis adjusting mechanism, and the other end is arranged through the furnace door sealing mechanism; The RY axis adjusting mechanism is used for driving the supporting rod mechanism and the furnace door sealing mechanism to make rotational movement in the second plane, the second plane is parallel to the Y axis direction; The oven door sealing mechanism is used to seal the oven nozzle. The invention has the advantages of simple overall structure, convenient adjustment, and simultaneously realizing the functions of supporting, adjusting and sealing. At the same time, the bearing capacity of the supporting bar mechanism is strong.

Description

technical field [0001] The invention relates to production equipment in the photovoltaic or semiconductor industry, in particular to a multi-axis adjustable suspension support device. Background technique [0002] In the semiconductor and photovoltaic fields, in high and low pressure diffusion, oxidation furnace, annealing furnace, low pressure chemical vapor deposition coating and other equipment, the sealing of the furnace door and the load-bearing capacity of the support mechanism used to support the quartz boat or graphite boat directly affect the performance of the equipment . With the increase of production capacity, the requirements for the sealing of the furnace body are getting higher and higher, and the load-bearing requirements of the supporting mechanism are also getting higher and higher. The traditional sealing mechanism and load-bearing mechanism can no longer meet the needs of production. [0003] In traditional low-voltage diffusion equipment for solar cel...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/18H01L21/22
CPCH01L21/22H01L31/18Y02P70/50
Inventor 刘群林佳继李东林朱太荣林依婷
Owner LAPLACE RENEWABLE ENERGY TECH CO LTD
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