Heat-driven micro-pump experimental device and method based on micro-fluidic technology

Abstract

The invention discloses a heat-driven micro-pump experimental device and method for pumping micro-fluid based on micro-fluidic technology in the field of microelectronic mechanical systems. The heat-driven micro-pump is driven by a liquid flowing-in micro-valve, six liquid flowing micro-valves and a liquid flowing-out micro-valve; a liquid inlet pipe, a liquid flow area and a liquid outlet pipe are combined into a whole, temperature sensors are arranged near heating resistors, and are used for detecting the temperature of different positions inside the heat-driven micro-pump in real time and feeding back to a microcontroller, the gas expansion force generated by heating and the deformation between materials are used as driving force, and the liquid is conveyed in the circulating heating mode for each part, so that the conversion between the heat energy and the mechanical energy is realized, the large driving force can be provided, the large diaphragm deformation is obtained under the low driving voltage, the conversion efficiency between the heat energy and the mechanical energy is improved, the stable flow can be provided, and the pulsation phenomenon of the micro-pump is effectively overcome.

Description

technical field [0001] The invention belongs to the field of microelectromechanical systems, relates to a heat-driven micropump experimental device and method based on microfluidic technology, and is a delivery device for pumping microfluid. Background technique [0002] Micro-motors, also known as micro-pumps, are the power source for micro-fluid transport. As an important micro-executive component, micro-pumps can be widely used in drug delivery, blood transport, DNA synthesis, micro-total analysis systems, and micro-fuel cells. . Micropumps can be mainly divided into piezoelectric-driven micropumps, electrostatically driven micropumps, electro-hydraulic power micropumps, and electroosmotic-driven micropumps. The above-mentioned driving methods each have different advantages, but also have their own shortcomings. For example, the driving voltage of the piezoelectric-driven micropump is high; the driving force of the electrostatic-driven micropump is small, and the deform...

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Problems solved by technology

[0004] The purpose of the present invention is to propose a low driving voltage, high flow efficiency, and can effectively overcome the pulsation phenomenon based on microfluidic technology, aiming at the defects of low flow efficiency, large flow pulsation and complex structure existing in thermally driven micropumps. Heat-driven micropump experimental device and experimental method of the experimental device

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