A preparation method of a multifunctional thermoelectric thin film power generation and light intensity sensor device

Abstract

The invention discloses a preparation method of a multifunctional thermoelectric thin film power generation and light intensity sensor device, belonging to the technical field of energy collection andsensing of a miniature thin film functional device. The method comprises the steps of: pretreating a substrate; depositing patterned high-density N-type thermoelectric thin films on the pretreated substrate; annealing the N-type thermoelectric film; depositing a patterned high-density P-type thermoelectric thin film and an electrode thin film on the pretreated substrate, wherein the electrode thin film serially connects a thermocouple formed by the pattern of the P-type thermoelectric thin film and the N-type thermoelectric thin film; forming a thermoelectric device by pasting a heat-absorbing film on the hot end of the thermocouple; and assembling the thermoelectric device with the Fresnel lens, the heat dissipation structure and the housing to form the multifunctional thermoelectric thin film power generation and light intensity sensor device. The invention can realize power generation and light intensity sensing, and the thermoelectric thin film device prepared by the method of theinvention has the characteristics of high output voltage, high responsiveness and the like through the light intensity sensing test.

Description

technical field [0001] The invention belongs to the technical field of energy collection and sensing of micro-thin-film functional devices, and specifically relates to a multifunctional high-density thermoelectric thin-film power generation device with high output voltage, high responsivity, high sensitivity, high accuracy, high reliability and wide response range. The preparation method of the light intensity sensor device. Background technique [0002] As all solid-state devices, thermoelectric devices contain no moving parts, thus reducing physical and electrical failures, and are also noise-free during long-term stand-alone operation for high reliability. Thermoelectric devices based on the Seebeck effect have been used in power generation, temperature measurement, and infrared detection. However, with the development of low power consumption and wireless electronic devices, as well as the continuous updating of components such as sensors and micro-electromechanical sys...

AI Technical Summary

Problems solved by technology

The light sensor devices prepared according to the photon effect only have high sensitivity to part of the wavelength range, and there is always noise; the light sensor devices based on the photothermal effect have no selectivity to the light wavelength range in principle, but due to the material The infrared absorption rate is high, so it is widely used in the detection of infrared rays, and is rarely used in the detection of visible light

Images