Preparation method of a multifunctional thermoelectric thin film power generation and light intensity sensor device

Abstract

The invention discloses a preparation method of a multifunctional thermoelectric thin film power generation and light intensity sensor device, which belongs to the technical field of energy collection and sensing of micro thin film functional devices. The method comprises the steps of: pretreating the substrate; depositing a patterned high-density N-type thermoelectric thin film on the pretreated substrate; annealing the N-type thermoelectric thin film; depositing a patterned N-type thermoelectric thin film on the pretreated substrate High-density P-type thermoelectric film and electrode film. The electrode film connects the thermocouple formed by the pattern of P-type thermoelectric film and N-type thermoelectric film in series; pastes a heat-absorbing film on the hot end of the thermocouple and then encapsulates it to form a thermoelectric device; the thermoelectric device and The Fresnel lens, heat dissipation structure and housing are assembled to form the multifunctional thermoelectric thin film power generation and light intensity sensing device. The invention can realize power generation and light intensity sensing, and through the light intensity sensing test, the thermoelectric thin film device prepared by the method of the invention has the characteristics of high output voltage, high responsivity and the like.

Description

technical field [0001] The invention belongs to the technical field of energy collection and sensing of micro-thin-film functional devices, and specifically relates to a multifunctional high-density thermoelectric thin-film power generation device with high output voltage, high responsivity, high sensitivity, high accuracy, high reliability and wide response range. The preparation method of the light intensity sensor device. Background technique [0002] As all solid-state devices, thermoelectric devices contain no moving parts, thus reducing physical and electrical failures, and are also noise-free during long-term stand-alone operation for high reliability. Thermoelectric devices based on the Seebeck effect have been used in power generation, temperature measurement, and infrared detection. However, with the development of low power consumption and wireless electronic devices, as well as the continuous updating of components such as sensors and micro-electromechanical sys...

AI Technical Summary

Problems solved by technology

The light sensor devices prepared according to the photon effect only have high sensitivity to part of the wavelength range, and there is always noise; the light sensor devices based on the photothermal effect have no selectivity to the light wavelength range in principle, but due to the material The infrared absorption rate is high, so it is widely used in the detection of infrared rays, and is rarely used in the detection of visible light

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