Method and device for machining laser-induced discharge surface micro-structures

Abstract

The invention discloses a method and a device for machining laser-induced discharge surface micro-structures. The method includes connecting micro-scale tool electrodes with negative electrodes of power sources, keeping certain gaps between the end surface of an end of each micro-scale tool electrode and the surfaces of to-be-machined regions of workpieces and filling the gaps with liquid work media; converging laser light in the gaps, gasifying the work media under the effect of energy of the laser light and generating continuous gas at the end of each micro-scale tool electrode; turning on the power sources, forming electric circuits between negative electrodes and positive electrodes, generating breakdown discharge when the strength of electric fields in the gaps is higher than the breakdown strength of the gas, and removing the surfaces of the to-be-machined regions of the workpieces by means of corrosion by high temperatures so as to machine fine structures on the surfaces of theworkpieces. The method and the device have the advantages that micro-structures of conductive materials or non-conductive materials can be machined by the aid of the method under corrosive electrolytesolution inapplicable conditions, the to-be-machined regions of the workpieces and the distances of the gaps can be regulated and controlled, and accordingly the micro-structures with different contours can be machined by the aid of the method and the device.

Description

technical field [0001] The present application relates to a microstructure compound processing method, and relates to a laser-induced discharge surface microstructure processing method and its device, which can be applied to the processing of the surface microstructure of conductive materials, non-conductive materials and semiconductor material workpieces. Background technique [0002] With the progress and development of science and technology, the trend of miniaturization of products and components is becoming more and more obvious, and various micro electromechanical systems (Micro Electro Mechanical System, MEMS) are more widely used in aerospace, automotive, microelectronics, precision navigation and other fields . As a result, there is an increasing demand for precise microfabrication techniques for microstructures. [0003] The current microfabrication technology is often only suitable for a certain type of specific materials or has certain limitations. For example,...

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Problems solved by technology

However, alkaline solution or neutral salt solution is highly corrosive to equipment, and the solution must undergo subsequent treatment, which is not friendly to the environment

For example, in the process of ECDM processing metal and other materials, the stray corrosion effect of the electrolytic reaction on the workpiece will cause changes in the physical characteristics of the workpiece surface and affect the accuracy of ECDM machining

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