Method for producing a layer with perovskite material and device with a layer of this type
A technology for perovskite materials and equipment, applied in the field of layered equipment, electro-optical and/or optoelectronic equipment, can solve the problems of high cost, manufacturing cost, damage to the lattice structure of perovskite materials, etc., and achieve reduced deterioration and high-efficiency equipment. , the effect of long-term stability improvement
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[0059] figure 1 The installation 10 shown in is a cold gas spraying installation and in the example shown is an installation 10 known per se for the aerosol-based cold deposition of powders. Facility 10 includes vacuum chamber 20 , vacuum pump 30 , aerosol source 40 and nozzle 50 . Details regarding the structure of the installation 10 are found, for example, in US 7,553,376 B2, which can be migrated to the current installation 10 without further adjustments.
[0060] The method according to the invention is carried out by means of the installation 10 as follows: The vacuum pump 30 evacuates the vacuum chamber 20 , which means a low pressure of a few millibars, here 5 millibars. An aerosol source 40 is located outside the vacuum chamber 20 and mixes a gas (for example oxygen and / or nitrogen) with the particles 60 of perovskite material and in this way provides an aerosol 70 . For this purpose, the perovskite material is provided beforehand by means of known chemical methods....
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