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Polycrystalline silicon reducing furnace

A reduction furnace, polysilicon technology, applied in the direction of silicon compounds, inorganic chemistry, non-metallic elements, etc., can solve the problems of uneven reaction temperature, affecting product quality, uneven material distribution, etc., to achieve uniform thickness and solve uneven reaction temperature. , the effect of improving product quality

Inactive Publication Date: 2018-10-19
SICHUAN YONGXIANG NEW ENERGY CO LTD
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In view of this, aiming at the deficiencies of the prior art, the present invention provides a polysilicon reduction furnace to solve the problem that the uneven reaction temperature caused by the uneven distribution of materials in the existing reduction furnace affects the product quality

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Embodiment Construction

[0020] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings and preferred embodiments.

[0021] see figure 1 , figure 2 , the present invention provides a polysilicon reduction furnace, which includes a chassis 1, an electrode 2 arranged on the chassis 1 and a bell jar 4 placed above the chassis 1, silicon core rods 3 are installed on the electrodes 2, and the chassis 1 A plurality of bottom air inlet nozzles 5 are arranged on the top, and the bottom air inlet nozzles 5 are distributed in concentric circles on the chassis 1. Four top air inlets 6 are also arranged around the edge of the chassis 1, and the top air inlets 6 are preferably symmetrical. Equidistantly arranged around the edge of the chassis 1 , the top air inlet 6 is connected to the top air intake extension pipe 7 , and the top end of the top ...

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Abstract

The invention discloses a polycrystalline silicon reducing furnace which comprises a chassis, an electrode arranged on the chassis and a bell jar arranged above the chassis, wherein silicon core rodsare mounted, in one-to-one correspondence, on the electrode; multiple bottom air inlet nozzles are formed in the chassis while multiple top air inlets are formed in the chassis; the top air inlets areconnected with top air inlet extension pipes; the top end of the top air inlet extension pipes are connected with top air inlet nozzles. According to the polycrystalline silicon reducing furnace disclosed by the invention, the chassis is directly connected to the top of the reducing furnace through a pipeline, then the problem of non-uniform reaction temperature in the reducing furnace is solved,an effect of balancing material distribution in the reducing furnace is realized, and the product quality is improved; meanwhile, additional workload on the furnace assembly / disassembly is avoided, and the disassembly is easy, convenient and practical.

Description

technical field [0001] The invention relates to a polysilicon production equipment, in particular to a polysilicon reduction furnace. Background technique [0002] With the development of science and technology, the solar photovoltaic industry and semiconductor industry are developing more and more rapidly, so the demand for polysilicon, the main raw material used in the production of solar photovoltaic industry and semiconductor industry, is also increasing. [0003] At present, there are many methods for producing polysilicon in the industry, among which the hydrogen reduction method, also known as the Siemens method, is more common. At present, the improved Siemens method is widely used. Compared with the traditional Siemens method, the improved Siemens method has advanced energy saving and low cost. consumption process, and can effectively recycle a large amount of SiCl in the production process 4 , HCl, H 2 And other by-products and a large amount of by-product heat. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/035
Inventor 王云鹏甘居富罗周游书华彭中庹如刚张杰
Owner SICHUAN YONGXIANG NEW ENERGY CO LTD
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