Multi-station automatic centering device under high-temperature and high-vacuum environment

Abstract

The invention discloses a multi-station automatic centering device under a high-temperature and high-vacuum environment. The multi-station automatic centering device under the high-temperature and high-vacuum environment comprises a main vacuum cavity, wherein the main vacuum cavity is arranged on a cavity bottom disc, a bearing rotation positioning mechanism is arranged in the main vacuum cavity,a main shaft of the bearing rotation positioning mechanism penetrates out of the main vacuum cavity and is fixed on the cavity bottom disc, three stations are arranged on the bearing rotation positioning mechanism and are used for placing workpieces, the workpieces are fixed on the bearing rotation positioning mechanism by workpiece fixtures, guide blocks are arranged on the workpiece fixtures, an MCP assembly tray is arranged below the main vacuum cavity, an MCP assembly is borne on the MCP assembly tray and comprises a lower kovar disc, and an MCP lifting mechanism is arranged below the MCPassembly tray and is arranged in an MCP cavity. The multi-station automatic centering device has the beneficial effects that initial centering of a three-station workpiece is achieved by the bearingrotation positioning mechanism, and automatic centering is achieved by the characteristic that an adjustment bottom disc in the MCP assembly tray can freely slide in the support adjustment disc in a horizontal direction by 360 degrees and by the geometric sizes of the guidance bottoms of the workpiece fixtures.

Description

technical field [0001] The invention relates to process equipment, in particular to a multi-station automatic centering device in a high-temperature and high-vacuum environment. Background technique [0002] In the three-station cathode transfer system, the workpiece is an ellipsoidal glass shell, referred to as the glass shell. The vacuum chamber of the equipment is a bell jar structure, which can be lifted. There are multiple observation ports on the bell jar cavity. The three glass shells can be At the same time, it rotates around the central axis of the bell cavity, and the three ellipsoidal glass bulbs can be transferred and switched between the first working station and the second working station at the same time. At the bottom of the frame, there are three working-station-one chambers and three working-station-station chambers, and the chambers are distributed on the circumference, and the bell cavity and the bottom plate are sealed with fluorine rubber rings. The eq...

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Problems solved by technology

In the indium sealing process, due to the influence of various uncertain factors at present, such as the inconsistency of the workpiece size, it is manifested in the verticality deviation of the sealing surface of the cutting disc, the coaxiality deviation between the cutting disc axis and the workpiece, etc.; Due to the rotation positioning error of the revolution disk; the position error caused by the heating of the equipment; the installation error of the glass bulb and other factors, it is difficult to guarantee the eccentricity accuracy of the upper and lower disc indium seals.

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