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Energy-saving safe vacuum coating machine

A vacuum coating machine, a safe technology, applied in the direction of vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems of energy consumption and safety, achieve high safety, avoid accidental burns, and avoid heat accumulation Effect

Active Publication Date: 2018-09-28
桑尼光电技术(安徽)有限公司
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Problems solved by technology

[0003] The purpose of the present invention is to provide an energy-saving and safe vacuum coating machine to solve the problems of energy consumption and low safety of the existing devices proposed in the above-mentioned background technology

Method used

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Embodiment Construction

[0019] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0020] see Figure 1-3 , the present invention provides a technical solution: an energy-saving and safe vacuum coating machine, comprising a vacuum coating machine body 1, a vacuum settling tube 2 runs through the center of the bottom of the vacuum coating machine body 1, and a base is provided at the bottom of the vacuum coating machine body 1 3. The bottom of the inner cavity of the base 3 is provided with a settling water tank 4, the bottom of the vacuum settlin...

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Abstract

The invention discloses an energy-saving safe vacuum coating machine in the technical field of coating equipment. The energy-saving safe vacuum coating machine comprises a vacuum coating machine body;a vacuum deposition pipe is disposed in the center of bottom of the vacuum coating machine body in a penetration mode; a base is disposed at the bottom of the vacuum coating machine body; a deposition water tank is disposed at the bottom of an inner cavity of the base; the bottom of the vacuum deposition pipe extends into an inner cavity of the deposition water tank; a drainage pipe is disposed at the bottom of the deposition water tank; the bottom of the drainage pipe extends to the bottom of the base; and a condenser is disposed in the center of the left side of the base. According to the energy-saving safe vacuum coating machine, every two oblique plates and one inverted V-shaped guide plate are distributed in a W shape, winders work to make the oblique plates rotate downwards, then inverted V-shaped placement plates are formed, dust slides off from the left sides and the right sides of the inverted V-shaped placement plates, the problem that non-uniform deposition occurs due to direct dropping of the dust is avoided, the deposition efficiency is high, the dust removal effect is good, influence of the dust on a vacuum pump is avoided, energy consumption is effectively reduced,and energy saving and emission reduction are achieved.

Description

technical field [0001] The invention relates to the technical field of coating equipment, in particular to an energy-saving and safe vacuum coating machine. Background technique [0002] Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a relatively high degree of vacuum, including many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, etc. The main idea is to divide into evaporation and sputtering. At present, when the vacuum coating machine is coating, the coating chamber is evaporating, and the vapor that is not evaporated on the film remains in the coating chamber. The vapor forms dust when it is cooled, and the dust is sucked away by the vacuum pump under the action of negative pressure. The dust affects The normal operation of the vacuum pump will increase the energy consumption of the vacuum pump, and even damage the vacuum pump in severe cases. The h...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/56C23C14/24
CPCC23C14/24C23C14/564
Inventor 柳一民王静辉
Owner 桑尼光电技术(安徽)有限公司
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