LTCC-based passive wireless pressure and temperature integrated sensor and its preparation method

Abstract

The invention provides a passive wireless pressure and temperature integrated sensor based on LTCC and a preparation method of the integrated sensor and solves the problem that existing sensor measurement parameters and signal response are single. The sensor has a wireless pressure sensitive part and a wireless temperature sensitive part which are stacked mutually; the wireless pressure sensitivepart comprises four layers of LTCC base plates, namely, a middle layer, a first layer with cavity, a second layer with cavity and a bottom layer, the first layer with cavity and the second layer withcavity are located above and below the middle layer and have corresponding cavities, the bottom layer is located below the second layer with cavity, a planar inductor and a cavity parallel plate capacitor first electrode are formed on the upper surface of the middle layer, a cavity parallel plate capacitor second electrode is formed on the upper surface of the bottom layer, and the two electrodescorrespond to the cavities of the first layer with cavity and the second layer with cavity; the temperature sensitive part comprises a base layer which is formed by an LTCC base plate, and a planer thermosensitive inductor and a planer interdigitated capacitor are formed on one surface of the base layer; the pressure sensitive part and the temperature sensitive part form two LC resonance circuitswith different resonant frequencies.

Description

technical field [0001] The invention relates to the field of LTCC technology and sensor research, in particular to an LTCC-based passive wireless pressure and temperature integrated sensor and a preparation method thereof. Background technique [0002] Automotive electronics, artificial intelligence, intelligent networking, environmental monitoring, and aerospace and other industrial and civil and national defense and military fields are inseparable from real-time monitoring of pressure and temperature parameters of equipment and systems by sensors, especially in some high-temperature, rotating, airtight, In harsh working environments such as corrosion, passive wireless sensors have incomparable technical advantages compared with traditional sensors that rely on power supply and require signal leads to connect, and are an important direction for future sensor development. [0003] The inductance-capacitance (LC) resonant sensor based on electromagnetic induction coupling rea...

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Problems solved by technology

[0006] The purpose of the present invention is to provide a passive wireless pressure and temperature integrated sensor based on LTCC and its preparation method, to solve the problem of single measurement parameters and signal response of the existing passive wireless sensor based on LTCC, and also provide pressure and temperature integrated sensors. The design and preparation of sensors provide a new idea

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