A gain-tunable surface acoustic wave micro-gyroscope based on graphene film

Abstract

The invention discloses a gain-adjustable surface acoustic wave micro-gyroscope based on graphene thin films. The gain-adjustable surface acoustic wave micro-gyroscope comprises a piezoelectric substrate, a surface acoustic wave resonator and a surface acoustic wave detector and is characterized in that the surface acoustic wave resonator comprises interdigital transducers, metal lattices are arranged between the interdigital transducers, and reflectors and sound absorption rubber are arranged on the outer sides of the interdigital transducers; the surface acoustic wave detector comprises delay lines symmetrically arranged on two sides of the surface acoustic wave resonator, and the delay lines are parallel with the surface acoustic wave resonator; each delay line comprises a pair of single-phase one-way interdigital transducers, one graphene thin film, a metal electrode I and a metal electrode II, the graphene thin film is arranged between the single-phase one-way interdigital transducers and provided with the metal electrode I and the metal electrode II, and the metal electrode I and the metal electrode II are vertical to the acoustic wave propagation of the surface acoustic waveresonator. The gain-adjustable surface acoustic wave micro-gyroscope has the advantages that by applying voltage to the electrodes to form electric fields, Coriolis effect secondary surface acousticwave gain is regulated, and the sensitivity, accuracy and stability of the micro-gyroscope are increased effectively.

Description

technical field [0001] The invention belongs to the field of design and manufacture of piezoelectric crystals and micromechanical gyroscopes, and in particular relates to a gain-adjustable surface acoustic wave microgyroscope based on a graphene film. Background technique [0002] Surface acoustic wave micro-gyroscope is a kind of all-solid-state micro-gyroscope with two-dimensional planar structure. Compared with traditional micro-mechanical vibrating or rotating gyroscopes, it can withstand high vibrations, large impacts, etc. Acceleration environment interference; standard two-dimensional processing technology is adopted, the structure is simple, the production difficulty is small, and the cost is saved; it is made of piezoelectric crystal and semiconductor materials, and the working life is long. Therefore, the surface acoustic wave micro-gyroscope has potential development advantages, and the development prospect is very broad. [0003] The existing surface acoustic wa...

AI Technical Summary

Problems solved by technology

Although the performance of this method has been greatly improved, there is still a certain gap compared with the traditional micro gyroscope.

[0004] To sum up, the low performance of the three forms of micro gyroscopes is mainly due to the weak secondary surface acoustic wave signal, resulting in low sensitivity, poor measurement accuracy, and low stability.

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