Asymmetric two-stage displacement amplification flexible micro-operation mechanism

Abstract

The invention relates to an asymmetric two-stage displacement amplification flexible micro-operation mechanism. The mechanism comprises a base body, a piezoelectric ceramic driver, an SR displacementamplification mechanism, a parallelogram lever amplification mechanism and a pre-tightening bolt, wherein the piezoelectric ceramic driver is installed on the base body through the pre-tightening bolt. The micro-operation mechanism only controls movement of one jaw, and the other jaw is connected with the base body and is fixed to be unmoved; the output end of the piezoelectric ceramic driver is connected with the input end of the SR displacement amplification mechanism through a flexible hinge IV, the SR displacement amplification mechanism is connected with the base body through a flexible hinge I, the output end of the SR displacement amplification mechanism is connected with the input end of the parallelogram lever amplification mechanism through a flexible hinge II, and the output endof the parallelogram lever amplification mechanism is connected with the jaws through a flexible parallel double-plate mechanism; and a metal strain gauge is adhered to the flexible parallel double-plate mechanism. According to the asymmetric two-stage displacement amplification flexible micro-operation mechanism, the asymmetric structure design is adopted, so that the structure of the micro-operation mechanism is compact, stable clamping is realized, and the defects of de-synchronic clamping and instability existing in symmetrical clamping are overcome.

Description

technical field [0001] The invention belongs to the field of micro-nano operation, and in particular relates to an asymmetric flexible micro-operation mechanism directly driven by piezoelectric ceramics and having two-stage displacement amplification. Background technique [0002] With the rapid development of micro-electromechanical systems (MEMS), the demand for micro-manipulation and micro-assembly technology is increasingly urgent. As a key component to realize micro-operation, micro-operation tool is the key link connecting micro-system and macro-system. With the development of micro-machining technology, microelectronics technology, MEMS, etc., the size of micro-miniature parts is getting smaller and smaller. Come higher demands. The rational design and manufacture of micro-operating mechanism is the key link to realize the operation of micro-small parts. [0003] The micro-operating mechanism used for the operation of micro-small parts is generally composed of a dr...

AI Technical Summary

Problems solved by technology

However, there will be certain errors in the actual processing and installation process, so that the clamps on both sides cannot achieve completely symmetrical movements.

Moreover, some micro-operating mechanisms have disadvantages such as complex structure, low efficiency, and small displacement magnification.

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