Four-shaft pedestal excitation device used for dynamic characteristics test of MEMS microstructure

Abstract

The invention discloses a four-shaft pedestal excitation device used for dynamic characteristics test of a MEMS microstructure. The four-shaft pedestal excitation device comprises a sleeve, a stackedpiezoelectric ceramic, a pressure sensor, an upper linkage block, a lower linkage block, a steel ball and the MEMS microstructure; a support plate and an electric lead screw transmission mechanism arearranged in the sleeve; the upper linkage block and the lower linkage block are respectively provided with a spherical groove and a conical groove for clamping the steel ball; the stacked piezoelectric ceramic is clamped between the pressure sensor and an elastic support; spring plungers are evenly distributed and connected on the upper linkage block, and an external end steel bead of the springplunger is respectively supported into a rectangular groove of an internal wall of the sleeve. The device can flexibly apply a pretightening force of different size on the stacked piezoelectric ceramic, and simultaneously makes an obtained pretightening force measurement value more accurately, makes an adjusting process for compensating parallelism error of two work surfaces of the stacked piezoelectric ceramic more unhindered and smooth, greatly reduces a shear force among each layer of the stacked piezoelectric ceramic, can avoid falling off of micro devices for test and is convenient for testing dynamic characteristics parameters of the MEMS microstructure.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, and in particular relates to a four-axis base excitation device for testing the dynamic characteristics of MEMS microstructures. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. [0003] In order to test the dynamic characteristic parameters of the microstructure, ...

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Problems solved by technology

[0005] 2. There is no direct connection between the upper connection block and the lower connection block and the sleeve, but are installed in the sleeve in turn by means of clearance fit. If the parallelism error of the two working surfaces of the stacked piezoelectric ceramics is large , there is not enough space to adjust the movable base structure;

[0006] 3. The pressure sensor is installed at the bottom of the lower connecting block. Since the movable base structure is self-adjusted, there is a certain inclination between the bottom of the lower connecting block and the working surface of the piezoelectric ceramic, so the pre-tightening force measured by the pressure sensor Or the output force of piezoelectric ceramics is not accurate; in addition, if the movable base structure causes the upper coupling block or the lower coupling block to contact the sleeve after adjustment, the error of the measurement result will further increase;

[0008] 5. In this device, gaskets of different thicknesses are used to change the magnitude of the pre-tightening force applied to the stacked piezoelectric ceramics, which leads to a complicated adjustment process and is not flexible enough

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