Echelle grating posture adjustment method and calibration device of spectrometer

Abstract

The invention belongs to the field of optical splitting systems of spectrometers, and relates to an echelle grating posture adjustment method and a calibration device of a spectrometer. According to the adjustment method, an echelle grating diffraction theory is employed; relative positions of light spot images of a plurality of orders of diffraction of an echelle grating on the echelle grating posture adjustment calibration device are precisely calculated according to particular parameters of an optical splitting module system; corresponding marks are made; accordingly, a three-dimensional posture of the echelle grating is adjusted via a fixing structure of the echelle grating. The calibration device is designed on a basis of the particular parameters of the echelle grating diffraction theory and the optical system, is precise in calculation, easy to realize and high in operability and can precisely achieve posture adjustment of the echelle grating in the spectrometer; in addition, the echelle grating posture adjustment calibration device is high in applicability; when the relevant optical parameters of the optical system are changed, the corresponding positions of light spots ofthe orders of diffraction of the echelle grating are required to be recalculated and redesigned.

Description

technical field [0001] The invention belongs to the field of spectrometer spectroscopic systems, and relates to a method for adjusting the posture of an echelle grating of a spectrometer and a calibration device. Background technique [0002] The échelle spectrometer uses an échelle grating with prism cross dispersion to form a two-dimensional spectrum on the image plane. This structure enables the échelle spectrometer to simultaneously achieve high-resolution and wide-band transient measurement. Echelle spectrometer is widely used in a series of elemental spectral analysis technologies such as atomic emission, atomic absorption or LIBS excitation light source due to its excellent characteristics such as high resolution, small size, and full-spectrum transient direct reading. As the most important spectroscopic element in the spectrometer, the échelle grating is very sensitive to the imaging quality of the system, which directly affects the system performance of the échelle ...

AI Technical Summary

Problems solved by technology

However, the above-mentioned methods all have disadvantages such as complex installation and adjustment, difficulty in realization, and difficulty in ensuring accuracy. It is difficult to ensure that the three-dimensional posture of the echelle grating meets the design requirements, which will affect the overall performance of the elemental spectrum analysis instrument.

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