A MOS tube-based dual-gate regulated ultra-high sensitivity biosensor
A technology of biosensors and MOS tubes, which is applied in the direction of nanotechnology for sensing, instruments, scientific instruments, etc., can solve the limitations of the wide application of ultra-high sensitivity biosensors, uncontrollable width of silicon nanoribbons, unstable device performance, etc. To avoid the loss of tumor markers, meet the needs of subsequent detection applications, and reduce the cost of processing and use
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Embodiment 1
[0050] Embodiment 1: Preparation of sensor of the present invention
[0051] Such as figure 1 As shown, the MOS tube-based biosensor provided by the present invention, the detection system and the microfluidic channel system bonded to each other, the detection system includes a substrate 8 and an ion implantation layer 7 tiled above the substrate 8, the Two groups of U-shaped electrode groups facing away from each other are set on the ion implantation layer 7; the two wings of the U-shaped electrode group are source-drain electrodes 1, 4, and a top layer gate 3 is connected to the bottom of the U-shaped electrode group, and the A surface grid 2 parallel to the top grid 3 and not connected to the U-shaped electrode group is arranged inside the U-shaped electrode group;
[0052] The source-drain electrodes 1, 4 and the top gate 3 are sequentially composed of a silicon layer 10, an oxide layer 9 and a metal layer 6 upward from the ion implantation layer 7;
[0053] The bottom o...
Embodiment 2
[0076] Example 2: Trace and real-time detection of alpha-fetoprotein (AFP) and carcinoembryonic antigen (CEA):
[0077] Test according to the following methods:
[0078] A. Modification of antibody protein: connect the microfluidic channel, use a syringe pump or a peristaltic pump to pass 1-1000 μg / ml antibody at room temperature and stay on the surface of the silicon nanowire 5, and the modification time is less than 0.1-10 hours; Washing with dyeing washing solution / PBST solution, drying the biosensor with nitrogen gas, the purpose of these operations is to modify the corresponding antibody of the target tumor marker on the silicon nanowire 5 of the biosensor;
[0079] B. Analysis: After fixing, pricking, and connecting pathways on the probe station, use a syringe pump or a peristaltic pump to pass the PBS solution through the microchannel system for 1-100 minutes at a flow rate of 0.001-100ml / min to obtain the basic current value. Then slowly transport the sample to be teste...
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