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Micromirror-based shared window laser radar system

A lidar and micromirror technology, applied in the field of shared window lidar systems, can solve the problems of complex receiving optical path, increase system volume and cost, and difficulty in applying portable equipment, and achieves increasing scanning frequency, reducing equipment volume, and widening The effect of application scenarios

Active Publication Date: 2018-05-22
WUXI INFISENSE PERCEPTION TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage of the laser radar system with separate transceivers is that the direction distribution of the echo light field is relatively wide, which makes the receiving optical path more complicated, increases the system size and cost, and is difficult to apply to portable devices

Method used

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  • Micromirror-based shared window laser radar system
  • Micromirror-based shared window laser radar system
  • Micromirror-based shared window laser radar system

Examples

Experimental program
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Effect test

Embodiment 1

[0027] Such as figure 1 As shown, the present invention provides a shared window lidar system based on micromirrors, comprising: a laser 1, a single mirror 2, a micromirror 3, a converging lens 4 and an optical detector 5;

[0028] A first through hole is opened on the one-way mirror 2;

[0029] The laser beam 7 generated by the laser 1 is emitted to the micromirror 3 through the first through hole, and then emitted to the detection target 6 through the micromirror 3;

[0030] The echo light beam 8 reflected back from the detection target 6 is reflected to the single-sided mirror 2 by the micromirror 3, then reflected to the convergent lens 4 by the single-sided emitter mirror, and then passed through the convergent lens 4 Converge to the photodetector 5.

[0031] Preferably, the laser 1 is a pulsed laser 1 .

[0032] The laser 1 may be a semiconductor edge emitting laser 1 , a vertical surface cavity emitting semiconductor laser 1 , a fiber laser 1 or the like.

[0033] T...

Embodiment 2

[0043] In the lidar system described in Embodiment 1, the micromirror 3 is an important optical relay component and scanning device in the optical path. On the one hand, the size of the reflection surface of the micromirror 3 defines the maximum reflection area; on the other hand, the micromirror 3 realizes the scanning of the light beam based on its own scanning structure.

[0044] Further, the micromirror 3 is a dynamically deformable micromirror.

[0045] In the present embodiment two, the basic structure of the mirror surface of the micromirror 3 is as follows: figure 2 As shown, it includes an outer mirror 10 and an inner mirror 11. The inner mirror 11 is connected to the outer mirror 10 via a connecting mechanism 12, and the outer mirror 10 is connected to an external fixed anchor point through a torsion shaft 13. The outer mirror 10, the inner mirror 11 and the connection mechanism 12 form a whole to rotate around the rotation axis, and the connection mechanism 12 is ...

Embodiment 3

[0049] exist figure 2 A structure of the micromirror 3 is shown in , in which the inner mirror 11 is rotated about the axis of rotation. During the rotation and oscillation process, the natural rotational frequency of the micromirror as a whole is determined by the total moment of inertia of the micromirror and the stiffness coefficient of the torsion axis 13 . Therefore, by adjusting the shape and size of the connecting mechanism 12, the overall rotation frequency of the micromirror is much lower than the natural frequency of the vibrator formed by the connecting mechanism 12 and the inner mirror 11. The size of the connecting mechanism 12 can be adjusted by adjusting the first width ( H1 ) and the first distance ( L1 ), and the shape of the connecting mechanism 12 can be formed by changing the etched pattern.

[0050] exist image 3 In the micromirror structure shown, four arc-shaped grooves are etched on the same circumference on the SOI with the center of the inner mirr...

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Abstract

The invention discloses a micromirror-based shared window laser radar system. The system comprises a laser, a single-sided reflector, a micromirror, a converging lens and a light detector; a first through hole is formed in the single-sided reflector; a laser beam generated by the laser is emitted to the micromirror through the first through hole, and thereafter, is emitted to a detection target through the micromirror; an echo light beam reflected from the detection target is reflected to the single-sided reflector by the micromirror and is reflected to the converging lens through the single-sided reflector; and the echo light beam is converged to the light detector through the converging lens. According to the micromirror-based shared window laser radar system of the present invention, the micromirror is adopted to replace a mechanical rotation structure, and therefore, equipment size can be greatly reduced, scanning frequency can be increased, and energy consumption is low.

Description

technical field [0001] The invention relates to laser radar, in particular to a shared-window laser radar system based on micromirrors. Background technique [0002] LiDAR is a high-precision distance measurement device. As an active detection device, lidar is not affected by day and night and has strong anti-interference ability. In addition to applications in fields such as terrain mapping, it has also attracted great attention in the fields of autonomous driving and drones in recent years. Traditional lidar uses multiple lasers combined with the design of mechanical rotating structure, which is not only slow and bulky, but also high energy consumption and high cost. Using a micromirror instead of a mechanical rotating structure can greatly reduce the size of the device, increase the scanning frequency, and consume less energy. In addition, since the micromirror can form a one-dimensional scanning mirror surface and scan in a two-dimensional surface, only one laser can ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01S7/481
CPCG01S7/4811G01S7/4817
Inventor 虞传庆王鹏陈文礼王宏臣孙丰沛董珊
Owner WUXI INFISENSE PERCEPTION TECH CO LTD
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