Preparation method of composite reflective film silicon nitride solar cell panel

Abstract

The invention discloses a preparation method of a composite reflective film silicon nitride solar cell panel, and belongs to the technical field of solar cells. The preparation method comprises the following steps of texturing; preparing hot diffusion; removing PSG; preparing a hydrogenation amorphous silicon layer; placing a mask on the amorphous silicon layer, covering a part of the hydrogenation amorphous silicon layer by a mask pattern, depositing silicon nitride to form a porous silicon nitride layer, and forming a composite anti-reflective film by matching of the hydrogenation amorphoussilicon layer and the porous nitride silicon layer; and printing and roasting an Ag back electrode, an Al back electric field and an Ag positive electrode. By excellent passivation effect of the amorphous silicon layer, low-reflectivity of the porous silicon nitride layer and excellent optimal matching of the amorphous silicon layer and the porous silicon nitride layer, the solar photon utilization ratio of the solar cell is greatly improved, the carrier recombination rate is greatly reduced, so that the conversion efficiency of the cell is greatly improved.

Description

technical field [0001] The invention belongs to the technical field of solar cells, and in particular relates to a method for preparing a composite reflective film silicon nitride solar cell panel. Background technique [0002] There are two development directions for silicon nitride solar cells: one is to reduce manufacturing costs, such as increasing the output per unit time, reducing the consumption of consumables, and reducing labor costs, etc.; the other is to improve conversion efficiency and prepare solar cells with high conversion efficiency. There are two main directions to improve the efficiency of silicon nitride solar cells: one is to reduce the reflectivity, improve the utilization rate of solar photons, and reduce the waste of solar photons; the other is to reduce the recombination rate of carriers and improve the electron collection ability. In terms of improving the utilization rate of solar photons, RIE black silicon technology and wet black silicon technolo...

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Problems solved by technology

[0003] However, the above-mentioned solutions to improve conversion efficiency are costly and cumbersome, and it is difficult for the same technology to take into account the two advantages of improving the utilization rate of solar photons and reducing the recombination rate of carriers, and there is limited room for efficiency improvement.