Large-area dynamic measurement device and large-area dynamic measurement method in preparation process of nano-film
A nano-film, preparation process technology, applied in the field of optical measurement, can solve problems such as the inability to achieve dynamic measurement
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[0043] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.
[0044] Such as figure 1 As shown, the embodiment of the present invention provides a large-area dynamic measurement device for the preparation process of a nanometer thin film, which includes an incident optical path unit and a reflected optical path unit, wherein the incident optical path unit includes a laser light source 10, a beam expander group 20, a mirror 30. The first 1 / 4 wave plate 40,...
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