Non-resonant self-adaptive reversible micro piezoelectric pump device

Abstract

The invention relates to a non-resonant self-adaptive reversible micro piezoelectric pump device, and belongs to the field of fluid transmission and control. A self-adaptive piezoelectric pump is composed of an upper cover, a pump body, a lower cover, a sealing ring and piezoelectric vibrators as a whole, wherein the three piezoelectric vibrators are connected and sealed with the sealing ring through bolts, and flow channels in the two sides communicate with a middle pump cavity through valve seats at the two sides; and a sensing unit with a small area and a drive unit with a large area are divided on a surface electrode of piezoelectric ceramic by the piezoelectric vibrators through an electrode division method. The non-resonant self-adaptive reversible micro piezoelectric pump device hasthe following characteristics and advantages: the drive voltages and frequency of the piezoelectric vibrators of a power part are changed through monitoring the working states of the piezoelectric vibrators, so that self-adaptive accurate control for an output flow can be realized, and high integration level / output accuracy is achieved; and the opening degree of a drive valve part is monitored, and each cycle period only contains a suction process and an exhaust process, so that the phenomenon of fluid backflow is avoided, and the non-resonant self-adaptive reversible micro piezoelectric pumpdevice is stable in outflow, small in pulsation and high in energy conversion efficiency due to the non-resonant characteristic.

Description

technical field [0001] The invention belongs to a micro-precision piezoelectric pump used in the field of micro-fluid transmission and control, in particular to a non-resonance self-adaptive and reversible micro-piezoelectric pump device. Background technique [0002] With the development of science and technology, a piezoelectric pump device based on the principle of inverse piezoelectric effect has appeared in the field of microfluidic transmission in recent years. Compared with traditional pumps, piezoelectric pumps have simple structure, low cost, small size, light weight, It has the characteristics of low energy consumption, no electromagnetic interference, and the output flow can be controlled according to the applied voltage or frequency. However, since the piezoelectric pump is a positive displacement pump, although its flow rate can be precisely controlled by changing the applied voltage or frequency in theory, in practice, the piezoelectric pump is generally driven...

AI Technical Summary

Problems solved by technology

[0003] ① Due to the limitation of bearing capacity, structure and other factors, the working environment has a great influence on its output flow

[0004] ②Because the piezoelectric pump is a complex fluid-solid coupling system composed of piezoelectric vibrator, working fluid, inlet and outlet valves and pump body, the change of external conditions will cause the drift of the optimal working frequency

[0005] ③ The hysteresis, creep, nonlinear and other bad characteristics of the piezoelectric ceramic itself, as well as the multiple piezoelectric effects of the piezoelectric ceramic, all affect the accuracy and controllability of the pump output flow

[0006] Therefore, simply adopting the method of adjusting the driving voltage cannot obtain higher output accuracy.

Therefore, at present, in precise microfluid delivery and control applications such as controlled drug release, DNA sample preparation, electrophoresis detection, PCR reaction, and chemical analysis, it is still necessary to use additional flow and pressure measuring instruments for real-time monitoring, which not only improves the use of cost, and increase the volume, quality and complexity of the system, which seriously hinders the popularization and application of piezoelectric pumps in micro-electromechanical systems and portable products

Images