Probe-type thin film thermocouple temperature sensor and manufacturing method thereof

Abstract

The invention discloses a probe-type thin film thermocouple temperature sensor and a manufacturing method thereof, and belongs to the technical field of thin film sensors. In the invention, a thin film thermocouple is deposited on a ceramic cylinder, a platinum resistor temperature sensor is packaged on the tail portion of the ceramic cylinder to measure the temperature of a cold end of the thin film thermocouple, and temperature compensation is performed on the thin film thermocouple. The ceramic cylinder with the thin-film thermocouple deposited is packaged and fixed in a metal tube shell using a high-temperature ceramic insulating bonding agent, and a temperature measurement junction of the thin film thermocouple is flush with the end surface of the tube shell and is directly exposed tothe temperature measurement environment. The characteristics of small physical size and fast response of the thin film thermocouple can be used to solve the need for instantaneous temperature measurement of a high-temperature and high-speed flow field in the aerospace field. At the same time, the probe-type tube shell package structure solves the technical problems of application and installationof the thin film thermocouple in practical engineering measurement environments.

Description

technical field [0001] The invention relates to a probe-type thin-film thermocouple temperature sensor and a manufacturing method thereof, in particular to a probe-type packaging structure and a thin-film preparation method, and belongs to the technical field of thin-film sensors. Background technique [0002] Engines, hypersonic wind tunnels and other equipment in the aerospace field have an urgent need for instantaneous and dynamic temperature measurement. Aeroengine, scramjet engine, pulse detonation engine and other test equipment to detect the flow field and working state is an important basis for engine design and optimization. Existing technologies mostly use monitoring pressure change process to characterize the working state of high-temperature and high-speed flow field. Temperature is an important parameter to characterize the working state of flow field, and there is still a lack of effective technical means for measuring flow field temperature under instantaneous...

AI Technical Summary

Problems solved by technology

[0004] Existing thin-film thermocouple temperature sensors are mostly prepared on planar ceramic substrates. The temperature measurement is realized by changing the sensitive material of the thin-film thermocouple. It is difficult to solve the problems of sensor installation and cold junction temperature compensation in the actual engineering measurement of the engine. Realize real-time measurement of engine inner wall flow field temperature

[0005] The national utility model patent "A Thin Film Temperature Sensor for Rapid Response Temperature Measurement" with the patent application number 201420695951.0 uses a thin film thermocouple coated on a flat substrate with the same material as the standard S-type and K-type thermocouples to achieve fast Responsive temperature measurement, this method is difficult to realize the installation of planar substrates in the engine, and there is a big gap from engineering applications

[0006] In addition, the national invention patent "an oxide thin-film thermocouple and its preparation method" with the patent application number 201510776351.6 uses a thin-film thermocouple prepared by depositing an oxide-sensitive thin film on a ceramic substrate to achieve high temperature measurement at 1000°C-1250°C Purpose, since the oxide thin film thermocouple needs to compensate the temperature of the cold junction of the thermocouple, it is necessary to measure the temperature of the cold junction of the oxide thin film thermocouple in real time in the actual engineering measurement. This patent does not consider that the engineering measurement process must The cold junction temperature compensation problem faced

Images