Electrothermal micro-thruster
A micro-thruster and electric heating technology, applied in the field of nano-satellite micro-propulsion system, to achieve high efficiency, strong adaptability, and good propulsion performance
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[0021] The present invention is a nickel micro-heating device, comprising:
[0022] A Pyrex glass substrate 2; and a silicon chip 4 anodically bonded on the Pyrex glass substrate 2;
[0023] A runner groove 3 is provided on the symmetry axis of the silicon chip, and the runner groove 3 is provided with a Laval spout 5 and a fluid inlet 8;
[0024] The device also includes: on the silicon chip 4, a resistor buried groove 6 is symmetrically arranged around the flow channel groove 3 and the fluid inlet 8; an insulating layer and a nickel resistor 7 are sequentially arranged in the resistor buried groove 6 from the inside to the outside;
[0025] The Pyrex glass substrate is provided with a pad 1 connected to the nickel resistor 7, and has an intersection with the nickel thin film resistor to form an effective contact;
[0026] The bonded surface of the Pyrex glass substrate 2 and the silicon chip 4 is: the grooved surface of the resistance buried groove 6 on the silicon chip 4, ...
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