Photoacoustic spectrometry gas sensing system of active air chamber based on semiconductor laser

Abstract

The invention discloses a photoacoustic spectrometry gas sensing system of an active air chamber based on a semiconductor laser. The photoacoustic spectrometry gas sensing system comprises an integrated semiconductor laser, a photoacoustic pool, a microphone, a photoelectric detection module, a signal processing module, a semiconductor laser control module, and a data output module, the integratedsemiconductor laser is directly integrated with one end of the photoelectric pool, the microphone is arranged on a side wall of the photoelectric pool, and a photosensitive surface of the photoelectric detection module aligns at a light extraction port of the photoelectric pool; the photoelectric detection module and an output terminal of the microphone are connected with an input terminal of thesignal processing module, the output terminal of the signal processing module is connected with the semiconductor laser control module, and the other output terminal is connected with the data outputmodule; and the semiconductor laser control module is connected with a control terminal of the integrated semiconductor laser. The photoacoustic spectrometry gas sensing system omits a middle link ofcoupling with fiber, injected light power is greatly increased, a light beam adjusting structure is simplified, and air chamber miniaturization and stability are increased.

Description

technical field [0001] The invention relates to a sensing unit structure in the field of gas detection and optical sensing, in particular to an active gas chamber structure integrating a semiconductor laser and a photoacoustic spectrum gas sensing system. Background technique [0002] In recent years, with the maturity and growth of the optical communication industry, the cost of a large number of high-performance optical devices has been continuously reduced, especially the semiconductor DFB lasers in the near-infrared communication band (800-1700nm), whose output power and linewidth characteristics have been greatly improved. promote. Makes online monitoring and quantitative analysis possible. Photoacoustic spectroscopy is a detection technology without background signal, which has the advantages of no consumption of carrier gas, high sensitivity, short detection time, and maintenance-free. For lower concentrations of sample gas, high sensitivity can still be obtained. ...

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention is to provide an integrated semiconductor laser-type active gas cell structure and photoacoustic spectroscopy for the existing gas cell / gas cell with complex semiconductor laser coupling and beam adjustment processes and poor stability. The gas sensing system greatly increases the injected light power, and at the same time simplifies the beam adjustment structure, realizing the miniaturization and improvement of the stability of the gas chamber

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