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Method using plasma to activate electron multiplier

A plasma and electron activation technology, which is applied in the direction of electron multiplier tubes, recycling technology, electronic waste recycling, etc., can solve problems such as failure of electron multipliers, activation performance degradation, etc., achieve rapid activation, good recovery effect, and simplify the process Effect

Active Publication Date: 2018-01-09
LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Aiming at the deficiencies in the prior art, the object of the present invention is to provide a method for activating an electron multiplier by using plasma, using the high reactivity of the plasma to remove pollutants on the surface of the electron multiplier, and at the same time, oxygen in the plasma state can enter the electron multiplier Inside the functional material of the multiplier, the defect positions formed by the functional material under the bombardment of the large electron beam are filled, thereby playing the role of activating the performance degradation or failure of the electron multiplier; the method has a simple process and can realize the function of the electron multiplier quick activation

Method used

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  • Method using plasma to activate electron multiplier

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Experimental program
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Effect test

Embodiment 1

[0021] After putting the failed electron multiplier into the plasma cleaning equipment, vacuumize the plasma cleaning equipment first, and then fill it with oxygen with a flow rate of 10sccm, so that the internal pressure of the plasma cleaning equipment is 200mTorr, and then at 100W input The power was applied for 10 minutes, and the temperature inside the plasma cleaning equipment was controlled at 26°C during the processing.

[0022] Test the gain value of the failed electron multiplier before and after treatment respectively. The test temperature is room temperature (25°C), and the test vacuum degree is -5 Pa, test results such as figure 1 shown. according to figure 1 The test results show that the gain value of the failed electron multiplier after treatment is significantly improved, and the gain value at 1400V is increased from 1000 before treatment to 3320.

Embodiment 2

[0024] After putting the invalid electron multiplier into the plasma cleaning equipment, vacuumize the plasma cleaning equipment first, and then fill the oxygen gas with a flow rate of 10 sccm and the argon gas with a flow rate of 10 sccm, so that the internal pressure of the plasma cleaning equipment is 150mTorr, and then processed at an input power of 150W for 20min, and the temperature inside the plasma cleaning equipment was controlled at 30°C during the processing.

[0025] Test the gain value of the failed electron multiplier before and after treatment respectively. The test temperature is room temperature (25°C), and the test vacuum degree is -5 Pa; According to the test results, the gain value of the failed electron multiplier after treatment is significantly improved, and the gain value at 1400V is increased from 860 before treatment to 3130.

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Abstract

The invention relates to a method using plasma to activate an electron multiplier, and belongs to the vacuum electron technical field; the method comprises the following steps: using the plasma high reaction activity to remove electron multiplier surface pollutants; simultaneously allowing plasma poise oxygen to enter the electron multiplier function material, thus filling defective bits formed bylarge electron beam bombardment on the function material, and activating the performance declined or failed electron multiplier. Compared with a normal heating annealing treatment process, the methodcan simplify the process, thus fast activating the electron multiplier functions, and providing better electron multiplier function recovery effect.

Description

technical field [0001] The invention relates to a method for using plasma to activate an electron multiplier, which belongs to the technical field of vacuum electrons. Background technique [0002] The electron multiplier is an electric vacuum device that realizes the amplification of tiny electric signals and is used for electric signal detection. During use, because the electron multiplier is polluted by the environment and bombarded by a large electron beam, its performance will gradually decay until it becomes invalid. At present, heat annealing treatment is used to realize the performance attenuation and the activation of the failed electron multiplier, and restore or partially restore its function. In addition, the process is time-consuming and complicated, and the pollutants adsorbed on its surface cannot be removed. Contents of the invention [0003] Aiming at the deficiencies in the prior art, the object of the present invention is to provide a method for activa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J9/50H01J43/00
CPCY02W30/82
Inventor 崔敬忠郭磊张玲侍椿科杨炜涂建辉陈江
Owner LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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