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Silicon-based micro gas chromatography column with high separation efficiency and preparation method thereof

A technology for micro gas chromatography and separation efficiency, which is applied in the field of silicon-based micro-gas chromatography columns and their preparation, can solve the problem that the separation efficiency of silicon-based micro-gas chromatography columns is difficult to be further improved, achieves good thermal stability and mechanical strength, improves the The effect of separation efficiency

Active Publication Date: 2021-07-09
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of the above-mentioned shortcoming of prior art, the object of the present invention is to provide a kind of high separation efficiency silicon-based micro-gas chromatography column and preparation method thereof, be used to solve the separation efficiency of silicon-based micro-gas chromatography column in the prior art that is difficult to further improve raised questions

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  • Silicon-based micro gas chromatography column with high separation efficiency and preparation method thereof
  • Silicon-based micro gas chromatography column with high separation efficiency and preparation method thereof
  • Silicon-based micro gas chromatography column with high separation efficiency and preparation method thereof

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Embodiment 1

[0048] Such as Figure 1 to Figure 8 and Figure 12 As shown, the present embodiment provides a preparation method of a silicon-based micro gas chromatography column with high separation efficiency, and the preparation method comprises steps:

[0049] Step 1), making a microchannel 2 and a microfluidic port 23 on the silicon substrate 1, wherein the microchannel 2 also has a plurality of channel units or and / or microcolumn 21 arrays;

[0050] Step 2), making a mask film layer 3 to protect the bonding surface on the silicon substrate 1;

[0051] Step 3), constructing nano-mesoporous silicon oxide 4 in the microchannel 2, and removing the mask layer 3 before firing, wherein, the nano-mesoporous silicon oxide 4 is simultaneously constructed on the plurality of channel unit or and / or surface of the array of micropillars 21;

[0052] As an example, the non-aqueous synthesis method of self-assembly induced by solvent volatilization is used to construct nano-mesoporous silicon oxi...

Embodiment 2

[0079] This embodiment provides a method for preparing a silicon-based micro-gas chromatographic column with high separation efficiency. The basic steps are as in Example 1, wherein, the difference from Example 1 is that after step 5) is completed, a step of nano-intermediation is added. Porous silica 4 functionalized. Step 6), based on the components to be separated, a corresponding modification material 6 is formed on the surface of the nano-mesoporous silicon oxide 4, such as Figure 5 As shown, in this embodiment, the modification of octadecyltrichlorosilane (OTS) on the surface of nano-mesoporous silicon oxide 4 is described as an example, including steps:

[0080] Step 6-1), add 10ml of toluene and 0.1ml of OTS to a small well-sealed glass bottle, and use a syringe to inject this configured OTS toluene solution from one port into the silicon-based micro gas chromatography column chip until the solution Flow out from the other port, seal both ends of the chromatographic ...

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Abstract

The invention provides a silicon-based micro-gas chromatographic column with high separation efficiency and a preparation method thereof. The preparation method includes: 1) making a microchannel and a microfluidic port on a silicon substrate; 2) making a mask layer to protect The bonding surface on the silicon substrate; 3) constructing nanometer mesoporous silicon oxide in the micro-channel; 4) bonding a packaging cover plate to the bonding surface of the silicon substrate; 5) based on The components to be separated form corresponding modification materials on the surface of the nanometer mesoporous silicon oxide. Since nano-mesoporous silica has a large specific surface area and pore volume, and has good thermal stability and mechanical strength, the present invention constructs it in a silicon-based micro-gas chromatography column, which can greatly improve the separation of the chromatographic column. Efficiency: The surface of nanometer mesoporous silicon oxide has a high density of silanol (Si‑OH), which can further construct a monomolecular layer with different separation functions on the surface according to the different separation objects to achieve the desired separation effect.

Description

technical field [0001] The invention relates to a silicon-based micro-gas chromatographic column with high separation efficiency and a preparation method thereof, which belongs to the field of micro-electromechanical systems, in particular to a silicon-based micro-gas chromatographic column with high separation efficiency based on mesoporous silicon oxide nanostructure technology. Micro gas chromatography column and preparation method thereof. Background technique [0002] The main function of the gas chromatographic column is to separate the mixed sample gas to be analyzed, which is the core component of the gas chromatograph. Traditional gas chromatography columns include capillary columns, packed columns, etc. Due to their large volume, special column thermostats are needed to heat them, and their power consumption can reach several kilowatts. Therefore, in order to realize the miniaturization of gas chromatographs, the micro Transformation is crucial. [0003] Since th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N30/60
Inventor 冯飞游文斌许鹏程李昕欣
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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