Soft X-ray imaging device of vacuum flight pipeline

An imaging device and X-ray technology, applied in the field of X-ray imaging, can solve the problems of reducing test efficiency, increasing sample detection cost, limiting the popularization and application of soft X-ray imaging, etc., and achieving the goal of reducing application cost, reducing propagation distance, and reducing attenuation Effect

Pending Publication Date: 2018-01-09
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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Problems solved by technology

Since placing the entire imaging device in a vacuum test environment will significantly increase the cost of sample testing and red

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  • Soft X-ray imaging device of vacuum flight pipeline

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Embodiment Construction

[0018] The present invention will be described in detail below with reference to the accompanying drawings and examples.

[0019] The invention provides a soft X-ray imaging device for a vacuum flight pipeline, see the attached figure 1 , including: X-ray tube 1, sample stage 2, vacuum flight pipeline 3 and X-ray camera 4;

[0020] The X-ray tube 1 is used to emit soft X-rays, and an X-ray emission source point 5 is arranged inside, and an X-ray tube light outlet 6 is processed on the end face;

[0021] The vacuum flight pipe 3 is a cylindrical shell with both ends closed, and its two ends are respectively processed with axial through holes, and the incident beryllium windows 7 and outgoing beryllium windows 8 are respectively installed on the axial through holes to seal them. The interior of the vacuum flight pipe 3 is in a vacuum state; the length of the vacuum flight pipe 3 is determined according to the set imaging magnification, its shape is square or circular, and the s...

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Abstract

The invention discloses a soft X-ray imaging device for a vacuum flight pipeline, which belongs to the technical field of X-ray imaging, and comprises: an X-ray tube, a sample stage, a vacuum flight pipeline and an X-ray camera; two opposite end faces of the vacuum flight pipeline Coaxial through holes are processed, and the incident beryllium windows and the exit beryllium windows are respectively installed on the two through holes to close them, and the inside of the vacuum flight pipe is in a vacuum state; the vacuum flight pipe is located between the X-ray tube and the X-ray camera , the sample stage used to fix the sample is located between the X-ray tube and the vacuum flight pipe, and the incident beryllium window of the vacuum flight pipe is close to the sample stage, and the exit beryllium window is close to the recording surface of the X-ray camera; the X-ray tube The X-ray emission source point, the center of the sample, the center of the incident beryllium window and the exit beryllium window, and the center of the recording surface of the X-ray camera are located on the same straight line; the device can perform soft X-ray imaging on the sample in the atmospheric environment.

Description

technical field [0001] The invention belongs to the technical field of X-ray imaging, and in particular relates to a soft X-ray imaging device for a vacuum flight pipeline. Background technique [0002] X-ray imaging is a technique widely used in scientific research and industrial production. X-rays have a strong transmission ability, can penetrate the sample, form a transmission image of the object on the recording device, and can perform perspective imaging of the sample without destroying the shape of the sample. X-ray imaging usually uses different parts of the sample to absorb X-rays differently to form a perspective image. For samples with light weight and very thin thickness, since the absorption difference caused by hard X-ray imaging is not large, it is necessary to use soft X-ray imaging to improve the contrast and resolution of the imaging. However, soft X-rays propagating in the atmosphere will be strongly absorbed by the air, which will weaken the signal inten...

Claims

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Application Information

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IPC IPC(8): G01N23/04
Inventor 易涛
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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