Quartz vacuum sensor with electrodeless tuning fork

A vacuum sensor and electrodeless technology, which is applied in the direction of vacuum gauges that measure changes in gas frictional resistance, can solve the problems of poor stability and reliability of vacuum sensors, narrow ranges, and poor sensitivity, so as to reduce mechanical fatigue and improve sensitivity , Eliminate the effect of temperature drift

Inactive Publication Date: 2018-01-09
NO 49 INST CHINESE ELECTRONICS SCI & TECH GRP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0024] The present invention aims to solve the problems of poor stability and reli...

Method used

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  • Quartz vacuum sensor with electrodeless tuning fork
  • Quartz vacuum sensor with electrodeless tuning fork
  • Quartz vacuum sensor with electrodeless tuning fork

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specific Embodiment approach 1

[0053] Specific implementation mode one: refer to Figure 1 to Figure 3 This embodiment is described in detail. The quartz vacuum sensor with an electrodeless resonant tuning fork described in this embodiment includes two tuning fork fork arms 1, a support isolation area 2, a metal electrode 6 and a quartz wafer 7,

[0054] The support isolation area 2 and the two tuning fork arms 1 are rectangular structures, the two tuning fork arms 1 have the same structure, the two tuning fork arms 1 are arranged at both ends of the upper surface of the support isolation area 2, and the two tuning fork arms There is a gap between 1, the support isolation area 2 and the two tuning fork arms 1 are in one piece structure,

[0055] Each tuning fork fork arm 1 is provided with an arc-shaped groove 4 at the edge connection between the fork arm 1 and the support isolation area 2,

[0056] Two parallel transparent grooves 3 are opened on the front surface of each tuning fork arm 1 near the top, ...

Embodiment

[0064] The quartz tuning fork is produced by the mechanical fork cutting method, the cutting shape is (zyw)-18°15', the thickness of the fork arm of the tuning fork is 5.2mm, and t / g=10. Two parallel rectangular through slots 3 are opened on the front surface of each tuning fork arm near the top, and arc-shaped grooves 4 are respectively made on the outer edges of the two tuning fork arms. , 5 rectangular slots were machined with the center line of each tuning fork arm as the axis of symmetry. Cut-shaped quartz plates parallel to the fork arms of the tuning fork are respectively inserted between the front and back, the left and the right, and between the two fork arms of the tuning fork. The distance between each of the quartz wafers and the fork arm of the tuning fork is equal to the integer multiple of the resonant wavelength of the fork arm of the tuning fork, and chromium-gold film electrodes are respectively prepared on the surface of the quartz wafer facing the fork arm ...

specific Embodiment approach 2

[0081] Specific embodiment 2: This embodiment is a further description of the quartz vacuum sensor with electrodeless resonant tuning fork described in specific embodiment 1. In this embodiment, the gap between two tuning fork fork arms 1 is equal to two tuning fork forks Integer multiples of the resonant wavelength of arm (1).

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Abstract

The invention relates to a quartz vacuum sensor with an electrodeless tuning fork and belongs to the quartz vacuum sensor field. The present invention aims to solve the problems of poor stability, poor reliability, poor sensitivity and narrow measuring range of an existing vacuum sensor. A gap is left between two fork arms; arc-shaped grooves are formed at the edge connection positions of each fork arm and a supporting isolation area; two parallel through channels near the top end of each fork arm are formed at the front surface of the corresponding fork arm; 2 to 5 rectangular through groovesare symmetrically formed in the supporting isolation area with the center line of the two fork arms adopted as an axis of symmetry; quartz crystal wafers which are parallel to the two fork arms are arranged at the gap between the two fork arms and around the supporting isolation area and the two fork arms respectively; metal electrodes are bonded onto two side walls of the quartz crystal wafer atthe gap and the inner walls of the quartz crystal wafers around the supporting isolation area and the two fork arms respectively; the metal electrodes and the quartz crystal wafers are of integral structures; and gaps are left between the metal electrodes and the two fork arms. The quartz vacuum sensor is applied to the aviation field and other fields.

Description

technical field [0001] The invention relates to a quartz vacuum sensor with an electrodeless resonant tuning fork. It belongs to the field of vacuum sensors. Background technique [0002] Vacuum sensor is a kind of sensor with weak technology but promising application prospects. It has a market in aviation, aerospace, shipbuilding, and semiconductor industries, such as: skydiving system actuators, super-high atmosphere monitoring, and exploration balloon projects from the surface to 100Km, etc. Urgent need for a pressure range of 10 5 ~10 -3 Pa vacuum sensor, but its status is not optimistic: [0003] The existing vacuum sensor has narrow dynamic range, low sensitivity, slow response speed, large volume and high power consumption, such as the Pirani type. Because of its structure, it has poor resistance to mechanical vibration and impact, and needs to be heated during use. It is not suitable for use at high temperatures, nor can it be used in flammable and explosive occa...

Claims

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Application Information

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IPC IPC(8): G01L21/16
Inventor 宋国庆王长虹姚东媛夏航邹向光王俊巍王万生
Owner NO 49 INST CHINESE ELECTRONICS SCI & TECH GRP
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