A test board for electrostatic discharge current waveform detection

Abstract

The invention provides a test board structure for CDM (Charged Device Model) ESD current waveform detection, which is used for effectively catching discharge current waveforms consistent with typical waveforms in international general test standards. The test board comprises a pogo probe used for direct contact with a discharge device, a filter used for filtering away high frequency interference, an attenuator used for reducing current peak values and facilitating testing, a testing resistor used for converting current signals and an earth plate used for connecting all the parts. The filter and the attenuator are located on the earth plate; the earth plate is connected with a metal socket to be connected with an oscilloscope; the earth plate comprises a structure for fixing, which is used for connection with other parts of a testing system.

Description

technical field [0001] The invention relates to the field of integrated circuits, in particular to a test board structure for detecting a charged device model (CDM, Charged Device Model) electrostatic discharge current waveform in an electrostatic discharge (ESD, Electro-Static discharge) test. Background technique [0002] With the development of technology, integrated circuit components tend to be more and more miniaturized and complicated. Usually, the number of transistors and other semiconductor devices contained in a small device reaches millions. Due to the extremely high density of transistors in the device, a small damage can lead to the scrapping of the entire device. Among the various electrostatic damages that devices may encounter, the CDM model is particularly noteworthy, not only because of its fast discharge speed, which often makes the protection circuit too late to conduct and cannot play a protective role, but also because the current detection of the ESD ...

AI Technical Summary

Problems solved by technology

[0007] 2. During the test, the whole process cannot be carried out in an ideal environment

Since the test signal is a high-frequency signal, any bad contact or inappropriate position of the equipment will have a great impact on the test results

[0009] 4. The supporting equipment of the CDM test system currently used is mass-produced, and the cost is high, so it is not suitable for a small number of tests in small companies or laboratories

[0011] 1. High cost

In the actual environment, interference may come from various places. To achieve no interference, all-round protection must be achieved. All parts from the interference source to the transmission path must be protected. This not only ensures the accuracy of the results but also significantly increased costs;

[0012] 2. Due to the high cost of the existing industrial testing equipment, it is impossible to replace parts frequently, so its testing range is limited, and once damaged, it will cost a lot of manpower, material and financial resources to repair, which is not flexible enough

[0013] 3. The current test equipment does not have a supporting structure specially designed to solve the influence of parasitic parameters, making the test results easily affected by parasitic parameters

[0014] 4. The current test equipment has poor plasticity and cannot be flexibly modified according to test requirements

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