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Electricity atomic force microscope probe with long life and high resolution

An atomic force microscope and probe technology, used in scanning probe technology, scanning probe microscopy, measuring devices, etc., can solve the problems of low lateral resolution, short life, easy wear and other problems of EFM probes, and improve the use of Longevity, improved consistency, effectiveness of bottlenecks

Inactive Publication Date: 2017-12-05
北京五泽坤科技有限公司
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  • Abstract
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Problems solved by technology

Therefore, the current EFM probe has a very low lateral resolution and is prone to wear resulting in a short life

Method used

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  • Electricity atomic force microscope probe with long life and high resolution

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Embodiment Construction

[0016] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments of the present invention belong to the protection scope of the present invention.

[0017] The invention adopts the carbon nanotube atomic force microscope probe as the basis, fully utilizes the advantages of the super high resolution and super long service life of the probe, and meanwhile the size of the carbon nanotube is optional. The most important thing is that carbon nanotubes provide a large aspect ratio and ultra-high resolution for the next step of conductive coating processing as an ideal template and carrier.

[0018] like figure 1 As shown, the carbon nanotube ...

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Abstract

The invention discloses a novel structural probe using a carbon nanotube probe to plate a conductive layer and a preparation method thereof, which solves the bottleneck problem of the current electrical atomic force microscope probe and greatly improves the life and resolution of the electrical atomic force microscope probe . On the basis of the existing carbon nanotube probes on the market, a conductive layer is plated on the side of the probes to make full use of the ultra-high resolution and ultra-long service life of the carbon nanotube probes. It solves the long-standing bottleneck problem of electrical atomic force microscope probe testing, improves the consistency of testing, and meets the needs of different application fields such as scientific research, industry, and teaching.

Description

technical field [0001] The invention relates to the field of atomic force microscopy, in particular to a long-life high-resolution electrical atomic force microscopy probe and a preparation method thereof. Background technique [0002] Atomic Force Microscope (AFM, Atomic Force Microscope) is an important instrument with atomic-level resolution for the analysis of surface morphology, heat, force, electricity, magnetism, optics and other properties. An important characterization tool in the life sciences and more. An atomic force microscope scans the surface of a sample with a very sharp tip attached to a cantilever. The force deflection of the cantilever is detected by the position change of the reflected light of the laser beam, and then processed by a computer to generate a surface topography image. Among them, the AFM probe is the key sensor in the atomic force microscope. As a daily consumable, its main manufacturers are distributed in Germany, Switzerland, the United...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/40
CPCG01Q60/40
Inventor 不公告发明人
Owner 北京五泽坤科技有限公司
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