A cross-type single-pole three-throw switch

Abstract

The invention discloses a cruciform single-pole triple-throw switch. A main structure of the switch consists of a substrate, microwave transmission lines, drive electrodes, an upper electrode, a lower electrode, fixed anchor points and air bridges. The microwave transmission lines and the drive electrodes are arranged on the substrate. The upper electrode is a T-shaped straight-plate-type structure. Single, double and triple contacts with elastic beams are used in the lower electrode. In an aspect of mechanics, impact force generated by the upper electrode, which is in rapid pull-down caused by the action of electrostatic force, on the lower electrode can be reduced, a cushioning effect is provided, and thus the contacts and the upper electrode are protected; and in an aspect of electricity, effective contacting can be enhanced, and ablation and adhesion due to weak contacting are avoided. When drive voltage is applied to the first drive electrode, the upper electrode under the action of the electrostatic force is pulled down to contact the contacts, the switch is currently in a conduction state, the upper electrode above the second drive electrode is tilted, an isolation degree of the switch is increased, self-actuation between the upper and lower electrodes is prevented, and the switch life and the microwave performance are also enhanced at the same time.

Description

technical field [0001] The invention belongs to the technical field of radio frequency MEMS, and in particular relates to a cross-type single-pole three-throw switch. Background technique [0002] RF MEMS switch has been a research hotspot in the field of MEMS since the 1990s. RF MEMS single-pole single-throw switch is a basic device for microwave circuit control circuits. Its function is to control the on-off of microwave signals in the transmission system. Used in pulse modulators, attenuators, phase shifters, and T / R components. [0003] At present, the institutions that conduct research on RF MEMS switches mainly include the 13th Institute of China Power Group, the 55th Institute of China Power Group, the Institute of Microelectronics of Tsinghua University, Southeast University, the Institute of Electronics of the Chinese Academy of Sciences, and North University of China. For example, the 40th Research Institute of China Electronics Technology Group Corporation disclo...

AI Technical Summary

Problems solved by technology

For example, the 40th Research Institute of China Electronics Technology Group Corporation discloses a radio frequency coaxial single-pole three-throw switch, which is mainly composed of a radio frequency interface, a radio frequency transmission structure, a driving system, an electromagnetic system and an input control system. J1-J2 is normally closed, so when J1-J3 is on or J1-J4 is on, the coil controlling J1-J2 and the coil of J1-J3 (J1-J4) must be powered at the same time to ensure that J1-J4 is on and J1-J2 is off , the structure of this switch is complicated, and the process is difficult to process, which reduces the yield of the switch

Images