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Laser etching apparatus and method of laser etching using the same

A laser etching and laser technology, applied in the manufacture of electrical components, electrical solid devices, semiconductor/solid devices, etc., can solve the problems of reduced productivity, time and effort, etc., and achieve the effect of improving productivity

Active Publication Date: 2017-10-20
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this case, when patterning the organic film formed on the substrate, a laser etching device can be used, but the laser etching device requires a lot of time and effort in maintenance and management, so there is a problem that productivity decreases.

Method used

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  • Laser etching apparatus and method of laser etching using the same
  • Laser etching apparatus and method of laser etching using the same
  • Laser etching apparatus and method of laser etching using the same

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Embodiment Construction

[0043] Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the accompanying drawings.

[0044] figure 1 It is a structural diagram of an organic light-emitting device. Figure 2a to Figure 2d It is a cross-sectional view of an organic light emitting display device for schematically illustrating formation of an organic light emitting structure of the organic light emitting display device.

[0045] refer to figure 1, the organic light-emitting element is sequentially stacked on the substrate to form an anode, a hole injection layer, a hole transfer layer, an emitting layer, and a hole blocking layer. ), electron transfer layer (electron transfer layer), electron injection layer (electron injection layer), cathode (cathode) and other films.

[0046] The organic thin film is composed of a multilayer of a hole injection layer, a hole transport layer, a light emitting layer, a hole blocking layer, an electron transport la...

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PUM

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Abstract

Disclosed is a laser etching apparatus and a method of laser etching using the same. The laser etching apparatus includes: a chamber having a substrate on which an organic film is formed and having a laser port formed toward the ground; and a laser irradiator that irradiates the laser beam through the laser port to the organic film of the substrate; a particle trap disposed within the chamber and over the laser port and including a body, an opening through the body and for passage of the laser light and a trapping section for trapping the dust generated from the organic film; a thin film module comprising a protective film disposed between the laser port and the particle trap which enables dust passing through the particle trap but and not collected by the particle trap to be accumulated and trapped and is formed of a transparent substance; and a thin film drive part capable of moving the protective film.

Description

technical field [0001] The present invention relates to a laser etching device and a laser etching method using the laser etching device, in particular to a laser etching method for forming an organic light emitting structure of an organic light emitting display device. Background technique [0002] Recently, benefiting from the development of technology, display products with smaller size, lighter weight and higher performance are being produced. So far, among display devices, conventional cathode ray tube televisions (cathode ray tube: CRT) have been widely used because of their advantages in performance and price, but they can overcome the disadvantages of CRT in terms of miniaturization and portability. , and display devices with the advantages of miniaturization, light weight and low power consumption, such as plasma display devices, liquid crystal display devices, and organic light-emitting display devices, are attracting attention. [0003] Among them, organic electr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/56H10K99/00
CPCH10K71/00H01L21/268H01L21/31138H10K71/211H10K71/231
Inventor 郑淏丞韩旼我
Owner SAMSUNG DISPLAY CO LTD
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