Capacitive accelerometer

Abstract

The invention discloses a capacitive accelerometer. The capacitive accelerometer comprises a base plate and a first semiconductor structure layer, wherein the first semiconductor structure layer is arranged on the base plate and comprises a first mass block, a first supporting base, a second supporting base, a first elastic part, a second elastic part, at least two first comb type capacitor bank and at least two second comb type capacitor bank. The first supporting base and the second supporting bas respectively correspond to the first axial direction and the second axial direction. The first elastic part is connected between the first mass block and the first supporting base in the mode that the first elastic part corresponding to the first axial direction is bent back and forth. The second elastic part is connected between the first mass block and the second supporting base in the mode that the second elastic part corresponding to the second axial direction is bent back and forth. The at least two first comb type capacitor banks and the at least two second comb type capacitor banks are respectively arranged at the positions corresponding to the first axial direction and the second axial direction and connected to the first mass block. The first axial direction is perpendicular to the second axial direction. Therefore, the size of the capacitive accelerometer can be further decreased.

Description

[0001] This application is a divisional application of an invention patent application with an application date of March 20, 2012, a divisional submission date of October 21, 2014, an application number of 201410561451.2, and an invention title of "capacitive accelerometer". The invention patent application is also a divisional application of the invention patent application with the application date of March 20, 2012, the application number 201210076677.4, and the invention name "capacitive accelerometer". All the above invention patent applications are hereby incorporated by reference. technical field [0002] The invention relates to an accelerometer, in particular to a capacitive accelerometer. Background technique [0003] Generally speaking, the traditional three-axis capacitive accelerometer adopts a capacitive sensing structure design with independent sensing axes, that is, the masses used to sense the acceleration of the X-axis, Y-axis, and Z-axis are independent of ...

AI Technical Summary

Problems solved by technology

Although this configuration can prevent the linearity and sensitivity of each axis from being affected by other axes in the acceleration sensing, but in order to achieve the purpose of reducing mechanical noise at the same time, the overall size of the accelerometer is often too large. question

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