Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Capacitive accelerometer

An accelerometer and capacitive technology, which is applied in the direction of measuring acceleration, multi-dimensional acceleration measurement, velocity/acceleration/impact measurement, etc., can solve the problem of large overall size of the accelerometer

Active Publication Date: 2015-01-28
RICHWAVE TECH CORP
View PDF6 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although this configuration can prevent the linearity and sensitivity of each axis from being affected by other axes in the acceleration sensing, but in order to achieve the purpose of reducing mechanical noise at the same time, the overall size of the accelerometer is often too large. question

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Capacitive accelerometer
  • Capacitive accelerometer
  • Capacitive accelerometer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0030] Please refer to figure 1 , figure 1 It is a top view of a capacitive accelerometer 10 proposed according to a first embodiment of the present invention. As shown in FIG. 1, the capacitive accelerometer 10 includes a substrate 12, a first semiconductor structure layer 14 and a first Two semiconductor structure layers 16 . The substrate 12 can be made of an insulating material (such as glass or ceramics) for loading the first semiconductor structure layer 14 and the second semiconductor structure layer 16 thereon, and the second semiconductor structure layer 16 is located on one side of the first semiconductor structure layer 14 , the structural design of the first semiconductor structure layer 14 and the second semiconductor structure layer 16 will be described respectively below.

[0031] First, in terms of the structural design of the first semiconductor structure layer 14, the first semiconductor structure layer 14 includes a first mass block 18, at least one first ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A capacitive accelerometer includes a substrate and a first semiconductor layer. The first semiconductor layer is disposed on the substrate and includes a first mass, first and second anchors, first and second elastic members, and first and second comb capacitor sets. The first and second anchors are disposed at positions corresponding to first and second axes respectively. The first elastic member is connected to the first mass and the first anchor in a manner of bending back and forth perpendicular to the first axis. The second elastic member is connected to the first mass and the second anchor in a manner of bending back and forth perpendicular to the second axis. The first and second comb capacitor sets are disposed at positions corresponding to the second and first axes respectively and connected to the first mass. The first axis is perpendicular to the second axis.

Description

technical field [0001] The invention relates to an accelerometer, in particular to a capacitive accelerometer. Background technique [0002] Generally speaking, the traditional three-axis capacitive accelerometer adopts a capacitive sensing structure design with independent sensing axes, that is, the masses used to sense the acceleration of the X-axis, Y-axis, and Z-axis are independent of their related sensing electrode components. Set to achieve the purpose of three-axis independent sensing. Although this configuration can prevent the linearity and sensitivity of each axis from being affected by other axes in the acceleration sensing, but in order to achieve the purpose of reducing mechanical noise at the same time, the overall size of the accelerometer is often too large. question. Therefore, how to further reduce its overall size and improve its sensitivity and linearity is one of the important issues in the structural design of capacitive accelerometers. Contents of...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/125
CPCG01P15/125G01P2015/0831G01P2015/082G01P15/18
Inventor 沈靖凯
Owner RICHWAVE TECH CORP
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com