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capacitive accelerometer

An accelerometer and capacitive technology, applied in the direction of measuring acceleration, speed/acceleration/impact measurement, measuring devices, etc., can solve the problem of large overall size of the accelerometer

Active Publication Date: 2017-04-12
RICHWAVE TECH CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although this configuration can prevent the linearity and sensitivity of each axis from being affected by other axes in the acceleration sensing, but in order to achieve the purpose of reducing mechanical noise at the same time, the overall size of the accelerometer is often too large. question

Method used

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Embodiment Construction

[0044] Please refer to figure 1 , figure 1 It is a top view of a capacitive accelerometer 10 proposed according to a first embodiment of the present invention. As shown in FIG. 1, the capacitive accelerometer 10 includes a substrate 12, a first semiconductor structure layer 14 and a first Two semiconductor structure layers 16 . The substrate 12 can be made of an insulating material (such as glass or ceramics) for loading the first semiconductor structure layer 14 and the second semiconductor structure layer 16 thereon, and the second semiconductor structure layer 16 is located on one side of the first semiconductor structure layer 14 , the structural design of the first semiconductor structure layer 14 and the second semiconductor structure layer 16 will be described respectively below.

[0045] First, in terms of the structural design of the first semiconductor structure layer 14, the first semiconductor structure layer 14 includes a first mass block 18, at least one first ...

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Abstract

The invention discloses a capacitive accelerometer. The capacitive accelerometer comprises a base plate and a first semiconductor structure layer, wherein the first semiconductor structure layer is arranged on the base plate and comprises a first mass block, a first supporting base, a second supporting base, a first elastic part, a second elastic part, a first comb type capacitor bank and a second comb type capacitor bank. The first supporting base and the second supporting bas respectively correspond to the first axial direction and the second axial direction. The first elastic part is connected between the first mass block and the first supporting base in the mode that the first elastic part perpendicular to the first axial direction is bent back and forth. The second elastic part is connected between the first mass block and the second supporting base in the mode that the second elastic part perpendicular to the second axial direction is bent back and forth. The first comb type capacitor bank and the second comb type capacitor bank are respectively arranged at the positions corresponding to the first axial direction and the second axial direction and connected to the first mass block. The first axial direction is perpendicular to the second axial direction. Therefore, the size of the capacitive accelerometer can be further decreased.

Description

technical field [0001] The invention relates to an accelerometer, in particular to a capacitive accelerometer. Background technique [0002] Generally speaking, the traditional three-axis capacitive accelerometer adopts a capacitive sensing structure design with independent sensing axes, that is, the masses used to sense the acceleration of the X-axis, Y-axis, and Z-axis are independent of their related sensing electrode components. Set to achieve the purpose of three-axis independent sensing. Although this configuration can prevent the linearity and sensitivity of each axis from being affected by other axes in the acceleration sensing, but in order to achieve the purpose of reducing mechanical noise at the same time, the overall size of the accelerometer is often too large. question. Therefore, how to further reduce its overall size and improve its sensitivity and linearity is one of the important issues in the structural design of capacitive accelerometers. Contents of...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/125
Inventor 沈靖凯
Owner RICHWAVE TECH CORP
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