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Method for manufacturing display panel, display panel and display device

A technology for a display panel and a manufacturing method, which is applied in the fields of semiconductor/solid-state device manufacturing, instruments, semiconductor devices, etc., can solve the problems such as the difficulty in realizing display panel technology, the reduction of the ability of storage capacitors to store charges, and the prolongation of the charging and discharging time of storage capacitors.

Active Publication Date: 2019-11-22
SHANGHAI TIANMA MICRO ELECTRONICS CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Due to the high annealing temperature, it is difficult to realize the technology of forming display panels in a low temperature environment
At the same time, the surface resistivity of the semiconductor active layer is still relatively large, and there is a certain contact resistance at the contact surface with the drain. The existence of this interface is not conducive to the effective transportation of electrons during the charging and discharging process of the capacitor, which prolongs the storage capacity. The charging and discharging time of the storage capacitor reduces the ability of the storage capacitor to store charges, thereby reducing the display effect of the display panel

Method used

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  • Method for manufacturing display panel, display panel and display device
  • Method for manufacturing display panel, display panel and display device
  • Method for manufacturing display panel, display panel and display device

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Embodiment Construction

[0020] The application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the related application, not to limit the application. In addition, it should be noted that, for ease of description, only parts relevant to the present application are shown in the drawings.

[0021] It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and embodiments.

[0022] Please refer to figure 1 as well as Figure 2a-Figure 2i , figure 1 An exemplary flow chart 100 of an embodiment of the method for manufacturing a display panel provided by the present application is shown, Figure 2a-Figure 2i for with figure 1 The cross-sectional vie...

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Abstract

The application discloses a method of manufacturing a display panel, the display panel and a display device. The display panel comprises a thin film transistor area and a capacitor area, and the method comprises the steps of forming a first pole plate of the capacitor area and the grid of a first thin film transistor on a substrate; forming a first insulating layer on a first conductor layer; orderly forming a semi-conductor active layer, an etching buffer layer and an etching barrier layer on the first insulating layer, and etching the etching barrier layer and the etching buffer layer which are located in the capacitor area; etching the etching barrier layer located in the thin film transistor area; forming the first pole and the second pole of the first thin film transistor on the etching barrier layer, and forming a second pole plate in the capacitor area. According to the method of the present invention, the storage capacity of a storage capacitor can be increased, and the charging / discharging speed of the storage capacitor is improved. Meanwhile, during the manufacturing process of the display panel, an oxide semiconductor layer is used as the etching buffer layer, and when other insulating layers are etched, an insulating medium of the storage capacitor can be protected effectively.

Description

technical field [0001] The present invention generally relates to the field of display technology, and in particular to a method for manufacturing a display panel, a display panel and a display device. Background technique [0002] With the improvement of display technology, display panels are also developing towards diversification. Existing display panels can be classified into flexible display panels and rigid display panels. In order to meet the diversified demands of the market for display panels, there are increasingly higher requirements for the manufacturing process of the display panels. [0003] In the existing display technology, thin film transistors and storage capacitors are usually arranged on the display panel. In liquid crystal display panels, thin film transistors are used to control the rotation of liquid crystals during display, in organic light-emitting electroluminescent display panels, thin film transistors are used to provide driving current to orga...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/77H01L27/12G02F1/1368
CPCG02F1/1368H01L27/1255H01L27/1259
Inventor 夏兴达吴天一
Owner SHANGHAI TIANMA MICRO ELECTRONICS CO LTD
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