One dimensional ultrasound phased array probe based on PIN-PMN-PT (lead indium niobate-lead magnesium niobate-lead titanate) ternary system piezoelectric monocrystalline and preparing method

Abstract

The invention discloses a one dimensional ultrasound phased array probe based on a PIN-PMN-PT (lead indium niobate-lead magnesium niobate-lead titanate) ternary system piezoelectric monocrystalline and a preparing method thereof. The phased array probe comprises a lower electrode, a 1-3 composite PIN-PMN-PT piezoelectric monocrystalline array, an upper electrode array and a flexible circuit board which are laminated from bottom to top in sequence; array elements of the upper electrode array and the array elements of the piezoelectric monocrystalline array correspond one to one, and print circuit passages on the flexible circuit board correspond to the array elements on the upper electrode array; a preparing method comprises adopting a photoetching and etching method for grooving to form the 1-3 composite PIN-PMN-PT piezoelectric monocrystalline array, and forming the lower electrode on a piezoelectric plate of the lower bottom surface of the PIN-PMN-PT piezoelectric monocrystalline array through a sputtering process, forming upper electrodes on the upper surface of the piezoelectric monocrystalline array and adopting the flexible circuit board to provide a lead for the electrodes to be connected to an external circuit. The one dimensional ultrasound phased array probe can bear higher working temperature and electric field.

Description

technical field [0001] The invention belongs to the technical field of ultrasonic transducers, and more specifically relates to a one-dimensional ultrasonic phased array probe based on a PIN-PMN-PT ternary piezoelectric single crystal and a preparation method thereof. Background technique [0002] Ultrasonic phased array probe is a device that realizes the conversion of acoustic signal and electrical signal, and can be divided into one-dimensional, two-dimensional, and circular arrays according to its structure. At present, the most widely used one-dimensional ultrasonic phased array probe is used in clinical medicine and other fields. With the improvement of imaging resolution, device miniaturization and probe precision requirements, the existing phased array probes also face many challenges, which are mainly reflected in the following two points: (1) The demand for high frequency, while the existing array probes The element spacing is inversely proportional to the center ...

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Problems solved by technology

With the improvement of imaging resolution, device miniaturization and probe precision requirements, the existing phased array probes also face many challenges, which are mainly reflected in the following two points: (1) The demand for high frequency, while the existing array probes The element spacing is inversely proportional to the center frequency, which has reached tens of microns. The shorter the spacing, the more difficult the wiring manufacturing process of each array element is; (2) Stability requirements, the existing lead magnesium niobate-lead titanate (PMN-PT) ultrasonic motors made of single crystal materials, piezoelectric transformers, medical ultrasonic transducers and other piezoelectric devices, because the stability of piezoelectric devices is mainly affected by the thermal stability and electric field stability of piezoelectric crystals, and PMN -PT series relaxor ferroelectric single crystal has low Curie temperature (130°C~170°C) and coercive field (200V / mm), making ultrasonic motors, piezoelectric transformers, and medical ultrasonic transducers using such materials The use environment of piezoelectric devices such as transformers is limited

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