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Method and device for measuring complex refractive index of coarse thin film on glass surface

A complex refractive index and glass surface technology, applied in the field of photoelectric precision measurement, can solve problems such as difficult to measure complex refractive index of rough surface film

Inactive Publication Date: 2017-06-23
SOUTH CHINA NORMAL UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

It overcomes the difficulty of measuring the complex refractive index of rough surface films by common methods

Method used

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  • Method and device for measuring complex refractive index of coarse thin film on glass surface
  • Method and device for measuring complex refractive index of coarse thin film on glass surface
  • Method and device for measuring complex refractive index of coarse thin film on glass surface

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Embodiment 1

[0063] Such as figure 1 As shown, the prism 1, the matching solution 2 and the slide glass 3 are assembled into a composite prism 5, one side of the slide glass 3 is coated with a rough film 4 to be tested, and the film 4 to be tested is located at the bottom of the composite prism 5, and the prism, The matching fluid and the glass slide have the same refractive index. Because the refractive index of prism, matching liquid and slide glass is the same, the light path diagram after compound prism 5 simplification is substantially as follows figure 2 shown.

[0064] A device for measuring the complex refractive index of a rough film on a glass surface, such as image 3 As shown, it includes a light source 6, a first aperture stop 7, a polarizer 8, a half mirror 9, a second aperture stop 10, a photodetector 11, an outer turntable 12, a rotating stage 13, Self-aligning photodetector 14, stepper motor 15, signal amplification and A / D card 16 and computer 17; Wherein, along the d...

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Abstract

The invention discloses a method and device for measuring the complex refractive index of a coarse thin film on a glass surface. The method is characterized in that a prism, a matching fluid and a glass slide are assembled into a composite prism, one side of the glass slide is plated with a coarse thin film to be measured, and the thin film to be measured is positioned at the bottom of the composite prism; the refractive indexes of the prism, the matching fluid and the glass slide are the same; a laser beam comes into the bottom surface of the composite prism from one side of the composite prism, light beam reflected by the interface of the coarse thin film and the composite prism comes out from the other side surface of the composite prism, and the light intensity of reflected light is measured; the composite prism is rotated step by step or the incident angle of the composite prism is changed step by step to obtain a curve which shows that the reflective light intensity changes along with the incident angle, the curve is compared with the light intensity of the incident light beam to obtain an experimental curve which shows that the reflectivity of the thin film to be measured changes with change of the incident angle, the intensity total reflectivity is calculated, and the complex refractive index of the thin film to be measured is calculated according to the intensity total reflectivity. The method is high in measurement precision, is not limited by the refractive index of the composite prism, and can be used for measuring the complex refractive index of the coarse thin film.

Description

technical field [0001] The invention belongs to the technical field of photoelectric precision measurement, in particular to a method and a device for measuring the complex refractive index of a rough film on a glass surface. Background technique [0002] The complex refractive index is one of the important optical parameters of thin films, and it is still a key technical problem to accurately measure the complex refractive index of thin films with various shapes. The methods for measuring the refractive index and absorption coefficient of thin film materials mainly include photometry, ellipsometry, Brewster's angle method, minimum deflection angle method and total reflection method. The photometric method uses the spectral transmittance curve or reflectance curve of the film to calculate the refractive index or thickness of the film. The measurement process requires repeated iterative calculations. When the thickness of the measured film is thin, the measurement results wil...

Claims

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Application Information

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IPC IPC(8): G01N21/41
CPCG01N21/41G01N2021/4126
Inventor 黄佐华吴亦冬袁凯华
Owner SOUTH CHINA NORMAL UNIVERSITY
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