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Method for making acid solution and silicon condenser microphone

A technology of silicon capacitor microphone and manufacturing method, which is applied in the direction of electrical components, electrostatic transducers, microphones, sensors, etc., can solve the problems of easily damaged diaphragm, back plate, prone to buckling, difficult to release stress gradient, etc., and achieve consistency Good, less impact, high sensitivity effect

Active Publication Date: 2017-06-13
AAC TECH PTE LTD
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  • Abstract
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Problems solved by technology

With the reduction of the size of the silicon condenser microphone, when the traditional etching method etches the sacrificial oxide layer to form the acoustic cavity, it is easy to damage the structure such as the diaphragm and the back plate, so that the flatness and reliability cannot be controlled, and buckling is easy to occur, which is difficult Relieving stress gradients that seriously affect the performance of silicon condenser microphones

Method used

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  • Method for making acid solution and silicon condenser microphone
  • Method for making acid solution and silicon condenser microphone
  • Method for making acid solution and silicon condenser microphone

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Embodiment Construction

[0022] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0023] The invention provides an acid solution, which is formed by mixing a strong acid and a buffer acid in a weight ratio of 1:2 to 1:5. The pH of the strong acid is 4 Mixture of F and HF. In a preferred embodiment of the present invention, the weight ratio of the strong acid to the buffer acid is 2:5.

[0024] The corrosion selectivity of the acid solution provided by the invention to different materials is specifically shown in the following table:

[00...

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Abstract

The invention provides a method for making an acid solution and a silicon condenser microphone. The acid solution is formed by mixing a strong acid and a buffer acid in a weight ratio of 1:2 to 1:5, wherein the PH of the strong acid is less than 3, and the buffer acid is a mixture of NH4F and HF. Compared with the related technology, the acid solution can effectively remove a sacrificial oxide layer and has little impact on the material of other silicon condenser microphone structures, and the silicon condenser microphone produced by the process is high in sensitivity, good in consistency, and high in stability.

Description

[0001] 【Technical field】 [0002] The invention relates to the technical field of silicon capacitor microphones, in particular to an acid solution and a method for making a silicon capacitor microphone. [0003] 【Background technique】 [0004] With the development of wireless communication, there are more and more mobile phone users around the world. The requirements of users for mobile phones are not only satisfied with calls, but also to be able to provide high-quality call effects. Especially the current development of mobile multimedia technology, the mobile phone Call quality is more important. The microphone of a mobile phone is used as a voice pick-up device for the mobile phone, and its design directly affects the call quality. [0005] Micro-Electro-Mechanical-System Microphone (MEMS for short) is currently the most widely used microphone with better performance. In the related art, the MEMS microphone includes a base, a back plate and a diaphragm. With the reduction ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H04R31/00H04R19/04
CPCH04R19/04H04R31/00H04R2201/003H04R2231/003
Inventor 许盛玉陈秋玉吴伟昌吕丽英黎家健
Owner AAC TECH PTE LTD
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