Method for making acid solution and silicon condenser microphone
A technology of silicon capacitor microphone and manufacturing method, which is applied in the direction of electrical components, electrostatic transducers, microphones, sensors, etc., can solve the problems of easily damaged diaphragm, back plate, prone to buckling, difficult to release stress gradient, etc., and achieve consistency Good, less impact, high sensitivity effect
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[0022] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0023] The invention provides an acid solution, which is formed by mixing a strong acid and a buffer acid in a weight ratio of 1:2 to 1:5. The pH of the strong acid is 4 Mixture of F and HF. In a preferred embodiment of the present invention, the weight ratio of the strong acid to the buffer acid is 2:5.
[0024] The corrosion selectivity of the acid solution provided by the invention to different materials is specifically shown in the following table:
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