Reflection-type digital holographic microscope imaging device based on electrically controlled varifocal lens

Abstract

The invention is applied to the technical field of optical imaging and measurement, and provides a reflection-type digital holographic microscope imaging device based on an electrically controlled varifocal lens. The device includes a laser device, a first beam splitter, a first light-path steering assembly, a second light-path steering assembly, a third light-path steering assembly, a second beam splitter and a camera; the first beam splitter separates lasers emitted by the laser device into object light and reference light; the first and second light-path steering assemblies are used for guiding the propagation direction of an object-light spherical wave to the second beam splitter, wherein the object-light spherical wave is generated after the object light goes through a microscope objective; the electrically controlled varifocal lens in the third light-path steering assembly is used for making the curvature of a reference-light spherical wave identical to the curvature of the object-light spherical wave by changing focal lengths, wherein the reference-light spherical wave is generated after the reference light goes through the electrically controlled varifocal lens; the third light-path steering assembly is used for guiding the propagation direction of the reference-light spherical wave to the second beam splitter, the second beam splitter is used for outputting the spherical waves, and the camera is used for recording a generated interference fringe pattern. According to the reflection-type digital holographic microscope imaging device based on the electrically controlled varifocal lens, phase distortion can be eliminated.

Description

technical field [0001] The invention belongs to the technical field of optical imaging and measurement, in particular to a reflective digital holographic microscopic imaging device based on an electronically controlled zoom lens. Background technique [0002] As an important means of quantitative phase measurement, digital holographic microscopic imaging technology can use a hologram to independently obtain quantitative amplitude information and phase information of an object at the same time, realizing real-time dynamic, high-resolution, non-invasive measurement. This technology is widely used in stress measurement, living cell observation, three-dimensional measurement of microstructure devices, etc. [0003] Digital holographic microscopy technology can improve the lateral resolution of the measurement system due to the introduction of the microscopic objective lens. Microscopic objectives with different magnifications can be used in the measurement of different samples....

AI Technical Summary

Problems solved by technology

Another method is to introduce an ordinary lens in the reference light path, and adjust the position of the lens to generate spherical waves with different curvatures to match the curvature of the microscope objective lens, but the above two methods require mechanical movement of the lens

[0006] Therefore, in the case of introducing a microscopic objective lens, it is necessary to mechanically move the lens to eliminate the phase distortion caused by the microscopic objective lens; and, when measuring different samples, on the one hand, it is necessary to manually switch between objective lenses with different magnifications for imaging , on the other hand, it is also necessary to move the lens mechanically to eliminate the phase distortion caused by the microscopic objective lens, which cannot guarantee the stability of the system

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