An online rapid measurement device and method for large-aperture grating damage
A large-aperture grating and measuring device technology, which is applied in the direction of measuring devices, optical instrument testing, and machine/structural component testing, can solve time-consuming problems and achieve high sensitivity, fast measurement speed, and optimized design.
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Embodiment 1
[0033] Such as figure 1 , Figure 2a with Figure 2b As shown, the online rapid measurement device for large-aperture grating damage of this embodiment includes a laser 1, a collimator lens 2, a half-wave plate 3, a polarization beam splitter 4, a first lens 5, a second lens 6, and a large Aperture grating 7, imaging system 8, data processing system 9,
[0034] The linearly polarized light beam emitted by the laser 1 is collimated by the collimator lens 2 into a parallel light beam. After passing through the half-wave plate 3, the parallel light beam passes through the polarization beam splitter 4 with high transmittance, and after passing through the polarization beam splitter 4 The transmitted light beam passes through the beam expansion system formed by the first lens 5 and the second lens 6 in turn to expand the beam diameter. The expanded beam is incident on the large-aperture grating 7 at the Littrow angle. The diffracted light will return along the original path, pass thr...
Embodiment 2
[0045] Such as figure 1 As shown, the online rapid measurement device for large-aperture grating damage of this embodiment includes a laser 1, a collimator lens 2, a half-wave plate 3, a polarization beam splitter 4, a first lens 5, a second lens 6, and a large Aperture grating 7, imaging system 8, data processing system 9,
[0046] The linearly polarized light beam emitted by the laser 1 is collimated by the collimator lens 2 into a parallel light beam. After passing through the half-wave plate 3, the parallel light beam passes through the polarization beam splitter 4 with high transmittance, and after passing through the polarization beam splitter 4 The transmitted light beam passes through the beam expansion system formed by the first lens 5 and the second lens 6 in turn to expand the beam diameter. The expanded beam is incident on the large-aperture grating 7 at the Littrow angle. The diffracted light will return along the original path, pass through the second lens 6 and the...
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