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Vacuum valve

A technology for vacuum valves and valve openings, applied in sliding valves, valve details, valve devices, etc., can solve problems such as long working hours and relying on operator experience, and achieve the effects of compact structure, low noise, and small volume

Inactive Publication Date: 2017-05-31
SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to overcome the existing problems such as long working time of pumping speed test and dependence on operator experience, the purpose of the present invention is to provide a vacuum valve that can be precisely controlled

Method used

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  • Vacuum valve
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Examples

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Embodiment Construction

[0015] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0016] Such as Figure 1~3 As shown, the present invention includes a linear stepper motor 1, an upper valve cover 13, a valve body 4, a telescopic screw rod 5, a valve seat 7, a lower valve cover 10 and a proximity sensor, wherein the valve body 4 is made of stainless steel, and the nominal The diameter can be 15, 25, 40, 50 and other specifications; the upper and lower ends of the valve body 4 are arranged with valve body sealing rubber rings 9, and the upper valve cover 13 and the lower valve cover 10 are respectively fixed by fastening screws 3 The upper and lower ends of the valve body 4 are sealed with the valve body 4 through the valve cover sealing rubber ring 8 and the valve body sealing rubber ring 9 .

[0017] The linear stepping motor 1 is used as an actuator, and is fixed on the top of the upper valve cover 13, and the seam adopts a small interf...

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Abstract

The invention relates to a pumping rate measurement valve, in particular to a vacuum valve. The vacuum valve comprises a linear stepper motor, an upper valve cover, a valve body, an extension lead screw, a valve base, a lower valve cover and an approaching sensor, wherein the upper valve cover and the lower valve cover are respectively mounted at the upper and lower two ends of the valve body; the valve base is positioned in the valve body; the linear stepper motor is mounted on the upper valve cover, and an output end is connected with the valve base through the extension lead screw; the approaching sensor mounted on the lower valve cover and for measuring the openness of the valve is arranged below the valve base; and the linear stepper motor drives the valve base to move up and down so as to realize closed-loop control of the openness of the valve. The linear stepper motor is adopted to drive the valve base to open and close up and down, and the approaching sensor measures the openness of the valve base, so that the measurement and the control are precise; and under airflow pulsation impact, the openness can be stabilized without changing, so that the flow is always stabilized on one numerical value.

Description

technical field [0001] The invention relates to a pumping rate measuring valve, in particular to a vacuum valve. Background technique [0002] The pumping rate is an important indicator of vacuum obtaining equipment. For a long time, the measurement of authoritative organizations has always been based on manual valve operation, which is very time-consuming and requires experience. Some valves are difficult to ensure the stability of the opening during the test, and different testers may have different test results. In particular, in the small flow test, due to the effect of "big numbers eat small numbers", the accuracy of readings is very high, so it is necessary to provide a solution for automatic testing of pumping speed; this solution can not only stay in the experimental In the laboratory stage, it needs to be engineering-oriented and suitable for pumps of various specifications. In addition, air is generally used for testing the pumping speed. In order to better simu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16K3/02F16K27/12F16K31/04F16K37/00
CPCF16K3/0218F16K27/12F16K31/046F16K37/0025
Inventor 王光玉孔祥玲毕德龙李昌龙
Owner SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI
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