Three-degree-of-freedom piezoelectric drive adjustment device and method capable of realizing translation and rotation

Abstract

A translational and rotational 3-degree-of-freedom piezoelectric driving adjusting device and method are provided; the device comprises X-directional translation mechanisms, Y-directional translation mechanisms, a Z-directional deflection mechanism and a carrier platform; the X-directional translation mechanism and the Y-directional translation mechanism have similar principles and each comprise a diamond displacement amplifying mechanism, a lever displacement amplifying mechanism and a guide mechanism that are arranged in symmetry, and the X-directional translation mechanism and the Y-directional translation mechanism are vertically mounted through base cavities; when a pair of piezoelectric stacks in each X-directional translation mechanism are under voltages equal in magnitude and opposite in direction, the platform translates in X-direction; a pair of piezoelectric stacks in each Y-directional translation mechanism are under voltages equal in magnitude and opposite in direction, the platform translates in Y-direction; the Z-directional deflection mechanism positioned at the bottom is composed of a mounting baseplate and two piezoelectric stacks with precompression, and outputs Z-directional deflection when the piezoelectric stacks therein are under the voltages equal in magnitude and opposite in direction. Owing to the guide mechanism, the X-directional translation and Y-directional translation of the platform are decoupled; the whole device is free of mechanical friction, and can provide 3-degree-of-freedom high-precision independent adjustment.

Description

technical field [0001] The invention belongs to the technical field of precision instruments, and in particular relates to a three-degree-of-freedom piezoelectric ceramic drive adjustment device and adjustment method that can realize translation and rotation. Background technique [0002] With the rapid development of high-tech technologies such as aerospace communication technology and ultra-precision machining technology, high-precision attitude adjustment mechanisms have been widely used in target scanning detection, tracking, aiming, astronomical telescopes, image stabilization control, and precise pointing of spacecraft communications. and play an increasingly important role. [0003] The electromagnetic actuating device with the voice coil motor as the core device often has the disadvantages of large size, electromagnetic leakage during operation, large power consumption and serious heat generation when maintaining the position. [0004] Based on the connection method...

AI Technical Summary

Problems solved by technology

[0003] The electromagnetic actuating device with the voice coil motor as the core device often has the disadvantages of large volume, electromagnetic leakage during operation, large power consumption and serious heat generation when maintaining the position.

[0004] Based on the traditional friction hinge connection method, there are disadvantages such as low transmission accuracy and component wear

[0005] The traditional displacement amplification mechanism will have a displacement coupling phenomenon after being driven by piezoelectric ceramics, which will seriously affect the accuracy of the attitude adjustment mechanism

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