3D contour online measuring instrument

Abstract

The invention discloses a 3D contour online measuring instrument which comprises a confocal displacement measuring probe and a piezoelectric linear driver wherein the confocal displacement measuring probe is installed on the piezoelectric linear driver. The confocal displacement measuring probe is installed on the detection work position of a piece of manufacturing equipment through a connection plate. When a sample is moved under the confocal displacement measuring probe, a measuring signal is sent to the confocal displacement measuring probe controller; and the piezoelectric linear driver brings the confocal displacement measuring probe to do reciprocal motions for the scanning of 2D contour and finally draws up the 3D contour. The 3D contour online measuring instrument of the invention uses a non-contact mode for measurement and is free of the influence of the rigidness of a sample surface, and does not cause any scratch to the sample. Compared with the interferometry method to measure the change in height, the instrument of the invention has more excellent angle characteristics with the lens surface measured reaching from plus and minus 25 degrees to plus and minus 45 degrees; the measured reflection surface can be within the scope of 87 degrees at the most.

Description

technical field [0001] The invention relates to a measuring instrument, in particular to a 3D profile online measuring instrument used for online 3D dimension detection of precision components in industries such as electronics, automobiles, and semiconductors. Background technique [0002] In the prior art, the contour extraction methods include: [0003] 1. Mechanical stylus method. [0004] In order to measure the fine pitches and peaks and valleys on the surface, it is necessary to use a very thin tip, the radius of which is generally a few microns. Diamonds are usually inlaid on the needle tip to increase the hardness of the needle tip and reduce wear. During the measurement process, the tip of the stylus is in close contact with the measured surface under the action of the mechanism's own gravity, external mechanical force or electromagnetic force, and the sensor connected directly with the stylus or through a mechanical lever detects the height value of the measureme...

AI Technical Summary

Problems solved by technology

[0008] The micro-interferometry has the following characteristics in summary: (1) It adopts multi-sampling point measurement or surface measurement, and the measurement efficiency is higher than that of the mechanical stylus method; (2) it has a high longitudinal resolution, which can reach a resolution above the nanometer level; Disadvantages: 1. The probe is larger than the mechanical probe, which is not conducive to installation due to space limitations in some online occasions; 2. It is difficult to produce interference effects when the surface is more than 5-10° inclined, and it is only suitable for measuring relatively flat surfaces

[0012] (1) The vertical measurement range is small, the phase measurement method is limited by the wavelength, and the scanning white light interference is generally only tens of microns; (2) Due to the limitation of the diffraction limit and the numerical aperture of the microscope objective lens, the lateral resolution is difficult to break through the sub-micron level, Therefore, it is not suitable for ultra-precision surface roughness measurement

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