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Automated program correctness management method and apparatus for ion implantation machine

A technology for ion implantation and management devices, applied in electrical digital data processing, error detection/correction, instruments, etc., can solve the problems of numerous ion implantation program parameters and complex software of the machine, and achieve the effect of saving manpower and avoiding losses

Active Publication Date: 2017-03-29
SHANGHAI HUALI MICROELECTRONICS CORP
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Problems solved by technology

However, due to the large number of ion implantation program parameters and the complexity of the machine software, it is difficult for engineers to detect errors 100% during re-inspection.

Method used

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  • Automated program correctness management method and apparatus for ion implantation machine
  • Automated program correctness management method and apparatus for ion implantation machine
  • Automated program correctness management method and apparatus for ion implantation machine

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Embodiment Construction

[0042] The implementation of the present invention is described below through specific examples and in conjunction with the accompanying drawings, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific examples, and various modifications and changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.

[0043] figure 1 It is a system architecture diagram of an automatic program correctness management device for an ion implantation machine according to the present invention. Such as figure 1 As shown, the present invention is an automatic program correctness management device for an ion implantation machine, which is used to implement correctness management for the automatic program of a N...

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Abstract

The invention discloses an automated program correctness management method and apparatus for an ion implantation machine. The method comprises the steps of receiving selection operation of a user, and selecting a target machine server; after the selection operation of the user is received, downloading to-be-checked programs from the target machine server according to the selection operation of the user; collecting to-be-checked parameters for the programs by adopting a missile attack method for traversing program file title lines column by column first and then traversing program files line by line; performing correctness check on the programs and the to-be-checked parameters, and outputting check results. Through the method and the apparatus, the programs of the NISSIN ion implantation machine can be automatically subjected to correctness check, so that the manpower of manual check is reduced, 100% checkout of program errors can be ensured better, and the loss caused by the program errors is avoided.

Description

technical field [0001] The invention relates to the field of semiconductor device manufacturing, in particular to an automatic program correctness management method and device for a NISSIN ion implantation machine. Background technique [0002] At present, in the chip manufacturing process, ion implantation is a very important process link. However, this process cannot be monitored online by means of film thickness and critical dimensions like other processes. Once the program is wrong, it will not be discovered until the electrical test, which will cause heavy losses. Therefore, the common practice in the industry is to arrange for engineers to recheck the program after the program is created, so as to correct the program errors before using the program. However, due to the large number of parameters in the ion implantation program and the complexity of the machine software, it is difficult for engineers to detect errors 100% during re-inspection. Contents of the inventi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F11/36
CPCG06F11/3604
Inventor 孙天拓戴树刚胡荣
Owner SHANGHAI HUALI MICROELECTRONICS CORP
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