Resistance choke type tiny particle and cell detection micro-fluidic chip and preparation method
A microfluidic chip, flow detection technology, applied in individual particle analysis, chemical instruments and methods, particle and sedimentation analysis, etc., can solve the possibility of increasing multiple particles/cells, damage to detected particles such as cells, detection problems such as low flux, to achieve the effect of increasing the effect, optimizing the structure size parameters, and improving the sensitivity
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[0061] The solutions of the present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0062] Such as figure 1 As shown, it is a schematic diagram of the top view structure assembly of the microfluidic chip for the electric impedance flow detection of tiny particles and cells according to a specific embodiment of the present invention. In this example, it is a schematic diagram of the assembly of 8 tiny electrodes.
[0063] The tiny electrodes on the substrate are usually made of gold or platinum, but other metals can also be used. The main reason is that the metal is required to have good inertness, and it is not easy to react in the solution when electrified. The micro-electrode is processed by micro-processing technology, and the thickness on the substrate is only tens to hundreds of nanometers, which hardly affects the structural size and fluid flow of the pipeline. The area of the electrode is as small...
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