Measurement device and measurement method for azimuth angle of grating scriber

Abstract

The invention discloses a measurement device and a measurement method for an azimuth angle of a grating scriber. The measurement device comprises a mounting seat, a rotating table and an observation mirror, wherein the mounting seat is used for mounting and locating a tool rack to be detected; the rotating table comprises a fixed part and a rotating part; both the rotating part and the fixed part are provided with angle scales along a circumferential direction; the mounting seat is mounted on the rotating part; the observation mirror is provided with a locating identification located at a reference position, so that the observation mirror can face to the rotating table. When the device is used, the tool rack with the grating scriber is mounted on the located mounting seat; the mounting seat is fixed on the rotating part, and the position of the rotating table is adjusted to be at the reference position, so that the rotating table can face to the observation mirror; then the rotating part is rotated to enable a cutting edge of the grating scriber to be overlapped with the locating identification; at the moment, the rotating angle of the rotating part relative to the fixed part is the azimuth angle of the grating scriber. The measurement device disclosed by the invention can directly measure the azimuth angle without repeated operation, and is high in accuracy and high in efficiency.

Description

technical field [0001] The invention relates to the technical field of gratings, in particular to a measuring device and a measuring method for the azimuth angle of a grating scribing knife. Background technique [0002] Diffraction grating is a precision light-splitting element. The principle of mechanically scribing diffraction grating is that the grating scribing knife extrudes a series of regular groove-shaped grating lines at equal intervals on the grating substrate coated with aluminum film or gold film. The parameters of the grating scribing knife affect the groove shape of the grating scribe line, and then affect the grating performance indicators such as diffraction efficiency, stray light, and ghost lines of the scribed grating. The parameters that need to be adjusted in the parameters of the grating scribing knife before scribing the diffraction grating include azimuth angle, orientation angle and pitch angle. The development of high-quality diffraction gratings r...

AI Technical Summary

Problems solved by technology

In the prior art, there is no direct measurement device for the azimuth angle of the grating scribing knife, and the adjustment process is prone to repeated adjustments, with low accuracy and low efficiency. unfavorable

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