Portable combined zeroing high precision laser large working distance autocollimation device and method

Abstract

The invention relates to the field of precision measurement technology and the field of optical engineering and in particular relates to a portable combined zero setting high precision laser large working distance auto-collimation device and method. The device comprises a light source, a collimating mirror, a reflector, and a feedback imaging system. The method makes reflected light beams return to the image plane center of the feedback imaging system by adjusting the reflector and obtains the angle change of the surface of a measured object by means of an angle deflection measuring device on the reflector. The reflector is added to a conventional auto-collimation angle measuring system, so that the problem that measurement is impossible because reflected light of a measured object deviates from the measuring system is solved and the auto-collimation working range is increased on the condition of the same working distance or the working distance is increased on the condition of the same working range. Owing to the specific design of the collimating mirror, the feedback imaging system and the reflector, the device is small, portable, and high in measurement precision, can monitor the stability of measurement environments, and can perform measurement rapidly.

Description

technical field [0001] The invention belongs to the field of precision measurement technology and the field of optical engineering, and in particular relates to a portable combined zeroing high-precision laser large working distance self-collimation device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few ...

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;

[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement

[0010] The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

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