Superconducting nanowire single photon detector fabricated on micro-nano fiber surface

A single-photon detector and superconducting nanowire technology, applied in the field of light detection, can solve problems such as low detection efficiency, and achieve the effects of improving optical coupling efficiency, reducing dynamic inductance, and improving speed.

Active Publication Date: 2016-11-16
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI +1
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Problems solved by technology

[0006] In view of the shortcomings of the prior art described above, the present invention provides a superconducting nanowire single photon detector prepared on the surface of a micro-nano fiber, which is used to solve the detection efficiency of the superconducting nanowire single photon detector in the prior art. lower question

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  • Superconducting nanowire single photon detector fabricated on micro-nano fiber surface
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  • Superconducting nanowire single photon detector fabricated on micro-nano fiber surface

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Embodiment 1

[0029] see figure 1 and figure 2 , the present invention provides a superconducting nanowire single-photon detector prepared on the surface of a micro-nano fiber. The superconducting nano-wire single-photon detector prepared on the surface of a micro-nano fiber includes: a micro-nano fiber 1 and a superconducting nanowire 2; Wherein, the superconducting nanowire 2 is located on the surface of the micro-nano fiber 1 , and the length direction of the superconducting nanowire 2 is consistent with the length direction of the micro-nano fiber 1 .

[0030] As an example, the micro-nano fiber 1 is drawn from a standard single-mode fiber, and the material of the micro-nano fiber 1 is SiO 2 .

[0031] As an example, the shape of the micro-nano fiber 1 is a cylindrical conical shape, and the diameter of the end face of the micro-nano fiber 1 is 1 micron, that is, the diameter of the cross-section of the micro-nano fiber 1 is 1 micron; The optical transmittance of the optical fiber 1...

Embodiment 2

[0041] see image 3 and Figure 4 , the present invention also provides a superconducting nanowire single-photon detector prepared on the surface of the micro-nano fiber, the superconducting nano-wire single-photon detector prepared on the surface of the micro-nano fiber is the same as the surface of the micro-nano fiber described in Embodiment 1 The structure of the prepared superconducting nanowire single photon detector is basically the same, the difference between the two is: the diameter of the micro-nano fiber 1 in the first embodiment is 1 micron, and the number of the superconducting nanowire 2 is 3 , the preparation method of the superconducting nanowire 2 is to use the magnetron sputtering process to form the NbN superconducting film and then need to etch the process; and in the present embodiment, the diameter of the micro-nano fiber 1 is 0.1 micron, so The root number of the superconducting nanowires is 1, and the preparation method of the superconducting nanowire...

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Abstract

The invention provides a superconducting nanowire single photon detector fabricated on a micro-nano fiber surface. The superconducting nanowire single photon detector comprises a micro-nano fiber and a superconducting nanowire, wherein the superconducting nanowire is arranged on the micro-nano fiber surface, and the length direction of the superconducting nanowire is consistent with the length direction of the micro-nano fiber. In the superconducting nanowire single photon detector, the superconducting nanowire is formed on the micro-nano fiber surface, direct and high-efficiency optical coupling of the micro-nano fiber and the superconducting nanowire can be achieved by means of optical transmission and coupling characteristics of the micro-nano fiber on a micro-nano scale, and the optical coupling efficiency of the superconducting nanowire single photon detector is improved; compared with a traditional device, the effective area of the superconducting nanowire is not limited by the size of an end surface of the fiber, the length of the superconducting nanowire can be reduced, thus, the dynamic inductance of the superconducting nanowire single photon detector is effectively reduced, and the rate of the superconducting nanowire single photon detector is further improved; and the superconducting nanowire is directly formed on the surface of the micro-nano fiber, and the long-term working stability of the superconducting nanowire single photon detector is improved.

Description

technical field [0001] The invention belongs to the technical field of optical detection, and designs a superconducting nanowire single-photon detector, in particular to a superconducting nanowire single-photon detector prepared on the surface of a micro-nano optical fiber. Background technique [0002] Superconducting Nanowire Single Photon Detector (SNSPD) is an important photodetector, which can realize single photon detection from visible light to infrared band. SNSPD mainly uses low-temperature superconducting ultra-thin film materials, such as NbN, Nb, NbTiN, WSi, etc., and superconducting nanowires are directly formed on the surface of silicon or other material substrates (such as MgO, sapphire). The typical thickness is about 5nm-10nm, and the device usually adopts a meandering nanowire structure with a width of about 100nm. [0003] When SNSPD works, it is placed in a low temperature environment (<4K), the device is in a superconducting state, and a certain bias...

Claims

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Application Information

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IPC IPC(8): H01L31/0256H01L31/0352H01L31/08B82Y15/00B82Y30/00
CPCB82Y15/00B82Y30/00H01L31/0256H01L31/0352H01L31/08
Inventor 尤立星巫君杰李浩王镇方伟童利民
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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