Air flotation vacuum adsorption carrying device

Abstract

The invention relates to an air flotation vacuum adsorption carrying device. The device comprises a lower working platform, an upper carrying working platform, a four-column table board gap limiting mechanism, and an air flotation vacuum absorption exchange carrying pneumatic control system; the lower working platform is a working platform of technological processing equipment; the technological processing equipment is formed by arranging a moving structure, a technological processing function mechanism and a related frame; the upper carrying platform is a carrying working platform of loading / unloading carrying equipment of the technological processing equipment; automatic carrying shifting equipment is formed by arranging related moving structures; the four-column table board gap limiting mechanism is connected with the lower working platform and the upper carrying platform; and the air flotation vacuum absorption exchange carrying pneumatic control system is connected with the lower working platform and the upper carrying platform. The air flotation vacuum adsorption carrying device enables workpieces in technological processing loading / unloading carrying of ultrathin glass substrate workpieces and ultrathin flexible display substrates to generate no deformation, largely increases the yield, and can realize large-scale automatic production line manufacturing.

Description

technical field [0001] The present invention relates to the technical fields of semiconductor microelectronics, flat panel display and optoelectronics. Specifically, the present invention relates to a workpiece conveying device applied in the technical fields of semiconductor microelectronics, flat panel display and optoelectronics. Background technique [0002] Ultra-thin glass 0.1-1.5mm, ultra-thin glass <0.1mm, ultra-thin glass 0.3-1.1mm are usually used for liquid crystal display LCD glass substrate workpieces, organic light-emitting display OLED glass substrate workpieces and touch screen workpieces, ultra-thin glass and Polyester film 0.03-0.2mm is used for flexible display workpieces. In 2012, Corning Corporation of the United States produced 100 μm windable screen glass. In 2013, Schott Company of Germany produced 25-100 μm roll-shaped ultra-thin glass. In 2014, Japan Asahi Glass Company demonstrated 50 μm ultra-thin float glass. In the production process of ultr...

AI Technical Summary

Problems solved by technology

However, ultra-thin glass display substrate workpieces and ultra-thin flexible display substrate workpieces increase in size and decrease in thickness, that is, the aspect ratio increases to a certain extent. Ultra-thin glass and polyester flexible film display workpieces cannot be supported by local adsorption and support of mechanical arms. Loading and unloading operation of the workpiece on the conveying plane workbench

Ultra-thin glass and polyester film with a thickness of <0.3mm show that the vibration of the ambient airflow caused by the movement of the glass substrate leads to torsional vibration fatigue and bending vibration fatigue. The glass substrate is damaged; During the process, the manipulator partially absorbs and supports the vacuum suction cup to transport the full-page glass LCD screen with the cutting line, causing deformation stress, so that the cutting line diffuses freely and directly destroys the display screen; Torsional vibration fatigue and bending vibration fatigue lead to quality damage; roller transmission vibration leads to vibration fatigue damage of ultra-thin glass substrates

At present, the ultra-thin glass substrate with a thickness of <0.3mm and the ultra-thin flexible transparent film transport mechanism are only partially manual equipment, which are transported by the slow dragging process of the substrate backing plate, and cannot be moved by using robots to separate finger suction cups or manual single-person or multi-person cooperation Workpiece (causing workpiece stress cracking or wrinkle damage), unable to realize automatic production line manufacturing

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