Method and device for removing oxide skin of polycrystalline silicon reduction furnace bell jar through laser

Abstract

The invention discloses a method and device for removing oxide skin of a polycrystalline silicon reduction furnace bell jar through laser. The method comprises the following steps that S1, the polycrystalline silicon reduction furnace bell jar is hoisted on supporting stand pillars; S2, a laser generator is started, a rotary working disk drives a Z-direction sliding rail to rotate, an X-direction sliding rail slides on the Z-direction sliding rail from bottom to top, and the polycrystalline silicon reduction furnace bell jar is automatically and rotationally scanned from bottom to top through the Z-direction sliding rail, the X-direction sliding rail and the rotary working disk; and S3, laser emitted by a laser emitting head is used for irradiating the inner wall of the polycrystalline silicon reduction furnace bell jar, the oxide skin adhering to the inner wall of the polycrystalline silicon reduction furnace bell jar is removed rapidly and conveniently, and the metal color of the polycrystalline silicon reduction furnace bell jar is restored. The oxide skin of the polycrystalline silicon reduction furnace bell jar can be rapidly and thoroughly removed, and the polycrystalline silicon reduction furnace bell jar is not damaged; the investment recovery is rapid, the cost is low, and no noise is generated; and no chemical agent or decontamination liquid is needed, the removed oxide skin is solid powder and can be recycled, and the environment is not polluted.

Description

technical field [0001] The invention relates to a method and a device for removing scale from a bell jar of a polysilicon reduction furnace, in particular to a method and a device for removing scale from a bell jar of a polysilicon reduction furnace by laser. Background technique [0002] As one of the most important equipment in polysilicon production, the reduction furnace is the "heart" part of the entire polysilicon production system and the core process link that affects the actual output. The quality of the produced polysilicon depends entirely on it. It is the most important energy-consuming process link. The power consumption of the reduction furnace accounts for 60% to 70% of the comprehensive power consumption of polysilicon production and 25% to 35% of the comprehensive production cost. [0003] Traditionally, chemical agents and mechanical methods are used for decontamination. Today, as my country's environmental protection laws and regulations are becoming mor...

AI Technical Summary

Problems solved by technology

However, the electrochemical operation of the bell jar device with a weight of several tons to tens of tons is difficult in handling and transportation, manpower and material resources are quite huge, and labor costs are increased.

And electrochemical use of electrolytic raw materials is also polluting

However, considering the advantages and disadvantages, most of them adopt this method at present, and the bell jar and disk surface that are processed once are only used 4 to 5 times, and then the energy consumption gradually rises to the highest level.

Moreover, the electrochemical equipment is bulky, and it takes one to two days to use it once for a large-volume object.

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